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{'id': 'https://openalex.org/W2402936723', 'doi': 'https://doi.org/10.1088/0957-4484/27/26/265301', 'title': 'Sub-5 nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template', 'display_name': 'Sub-5 nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template', 'publication_year': 2016, 'publication_date': '2016-05-18', 'ids': {'openalex': 'https://openalex.org/W2402936723', 'doi': 'https://doi.org/10.1088/0957-4484/27/26/265301', 'mag': '2402936723', 'pmid': 'https://pubmed.ncbi.nlm.nih.gov/27188268'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1088/0957-4484/27/26/265301', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S206811868', 'display_name': 'Nanotechnology', 'issn_l': '0957-4484', 'issn': ['0957-4484', '1361-6528'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320083', 'host_organization_name': 'IOP Publishing', 'host_organization_lineage': ['https://openalex.org/P4310311669', 'https://openalex.org/P4310320083'], 'host_organization_lineage_names': ['Institute of Physics', 'IOP Publishing'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref', 'pubmed'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5109265263', 'display_name': 'Ju Yeon Woo', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I197347611', 'display_name': 'Korea University', 'ror': 'https://ror.org/047dqcg40', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I197347611']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Ju Yeon Woo', 'raw_affiliation_strings': ['School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea'], 'affiliations': [{'raw_affiliation_string': 'School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea', 'institution_ids': ['https://openalex.org/I197347611']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5110388151', 'display_name': 'Hyo Han', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I197347611', 'display_name': 'Korea University', 'ror': 'https://ror.org/047dqcg40', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I197347611']}], 'countries': ['KR'], 'is_corresponding': True, 'raw_author_name': 'Hyo Han', 'raw_affiliation_strings': ['School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea'], 'affiliations': [{'raw_affiliation_string': 'School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea', 'institution_ids': ['https://openalex.org/I197347611']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5108585707', 'display_name': 'Ji Weon Kim', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I197347611', 'display_name': 'Korea University', 'ror': 'https://ror.org/047dqcg40', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I197347611']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Ji Weon Kim', 'raw_affiliation_strings': ['School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea'], 'affiliations': [{'raw_affiliation_string': 'School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea', 'institution_ids': ['https://openalex.org/I197347611']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5111507828', 'display_name': 'Seung-Mo Lee', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I4210111434', 'display_name': 'Korea Institute of Machinery and Materials', 'ror': 'https://ror.org/01qcq9d74', 'country_code': 'KR', 'type': 'facility', 'lineage': ['https://openalex.org/I2801339556', 'https://openalex.org/I4210111434', 'https://openalex.org/I4387152098']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Seung-Mo Lee', 'raw_affiliation_strings': ['Department of Nanomechanics, Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials (KIMM), 156 Gajungbuk-ro, Yuseong-gu, Daejeon 305-343, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Nanomechanics, Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials (KIMM), 156 Gajungbuk-ro, Yuseong-gu, Daejeon 305-343, Korea', 'institution_ids': ['https://openalex.org/I4210111434']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5013874082', 'display_name': 'Jeong Sook Ha', 'orcid': 'https://orcid.org/0000-0003-1358-3295'}, 'institutions': [{'id': 'https://openalex.org/I197347611', 'display_name': 'Korea University', 'ror': 'https://ror.org/047dqcg40', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I197347611']}], 'countries': ['KR'], 'is_corresponding': True, 'raw_author_name': 'Jeong Sook Ha', 'raw_affiliation_strings': ['Department of Chemical & Biological Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea'], 'affiliations': [{'raw_affiliation_string': 'Department of Chemical & Biological Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea', 'institution_ids': ['https://openalex.org/I197347611']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5001838991', 'display_name': 'Joon Hyung Shim', 'orcid': 'https://orcid.org/0000-0002-3995-1968'}, 'institutions': [{'id': 'https://openalex.org/I197347611', 'display_name': 'Korea University', 'ror': 'https://ror.org/047dqcg40', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I197347611']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Joon Hyung Shim', 'raw_affiliation_strings': ['School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea'], 'affiliations': [{'raw_affiliation_string': 'School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea', 'institution_ids': ['https://openalex.org/I197347611']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5003905143', 'display_name': 'Chang‐Soo Han', 'orcid': 'https://orcid.org/0000-0002-1927-9422'}, 'institutions': [{'id': 'https://openalex.org/I197347611', 'display_name': 'Korea University', 'ror': 'https://ror.org/047dqcg40', 'country_code': 'KR', 'type': 'education', 'lineage': ['https://openalex.org/I197347611']}], 'countries': ['KR'], 'is_corresponding': True, 'raw_author_name': 'Chang-Soo Han', 'raw_affiliation_strings': ['School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea'], 'affiliations': [{'raw_affiliation_string': 'School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea', 'institution_ids': ['https://openalex.org/I197347611']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 2, 'corresponding_author_ids': ['https://openalex.org/A5110388151', 'https://openalex.org/A5013874082', 'https://openalex.org/A5003905143'], 'corresponding_institution_ids': ['https://openalex.org/I197347611', 'https://openalex.org/I197347611', 'https://openalex.org/I197347611'], 'apc_list': None, 'apc_paid': None, 'fwci': 0.271, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 3, 'citation_normalized_percentile': {'value': 0.537757, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 77, 'max': 79}, 'biblio': {'volume': '27', 'issue': '26', 'first_page': '265301', 'last_page': '265301'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T11272', 'display_name': 'Nanowire Synthesis and Applications', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T11272', 'display_name': 'Nanowire Synthesis and Applications', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9997, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10472', 'display_name': 'Semiconductor materials and devices', 'score': 0.9995, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/nanoelectronics', 'display_name': 'Nanoelectronics', 'score': 0.7468883}, {'id': 'https://openalex.org/keywords/template', 'display_name': 'Template', 'score': 0.5174154}, {'id': 'https://openalex.org/keywords/deposition', 'display_name': 'Deposition', 'score': 0.42318565}], 'concepts': [{'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.91523767}, {'id': 'https://openalex.org/C69544855', 'wikidata': 'https://www.wikidata.org/wiki/Q757625', 'display_name': 'Atomic layer deposition', 'level': 3, 'score': 0.84277606}, {'id': 'https://openalex.org/C74214498', 'wikidata': 'https://www.wikidata.org/wiki/Q631739', 'display_name': 'Nanowire', 'level': 2, 'score': 0.8251716}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.76775193}, {'id': 'https://openalex.org/C141400236', 'wikidata': 'https://www.wikidata.org/wiki/Q1479544', 'display_name': 'Nanoelectronics', 'level': 2, 'score': 0.7468883}, {'id': 'https://openalex.org/C513720949', 'wikidata': 'https://www.wikidata.org/wiki/Q1778729', 'display_name': 'Carbon nanotube', 'level': 2, 'score': 0.7060958}, {'id': 'https://openalex.org/C186187911', 'wikidata': 'https://www.wikidata.org/wiki/Q1093894', 'display_name': 'Nanostructure', 'level': 2, 'score': 0.68971354}, {'id': 'https://openalex.org/C162117346', 'wikidata': 'https://www.wikidata.org/wiki/Q1106386', 'display_name': 'Nanolithography', 'level': 4, 'score': 0.6822002}, {'id': 'https://openalex.org/C136525101', 'wikidata': 'https://www.wikidata.org/wiki/Q5428139', 'display_name': 'Fabrication', 'level': 3, 'score': 0.60517395}, {'id': 'https://openalex.org/C45206210', 'wikidata': 'https://www.wikidata.org/wiki/Q2415817', 'display_name': 'Nanoscopic scale', 'level': 2, 'score': 0.56398165}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.5556208}, {'id': 'https://openalex.org/C82714645', 'wikidata': 'https://www.wikidata.org/wiki/Q438331', 'display_name': 'Template', 'level': 2, 'score': 0.5174154}, {'id': 'https://openalex.org/C2777289219', 'wikidata': 'https://www.wikidata.org/wiki/Q7632154', 'display_name': 'Substrate (aquarium)', 'level': 2, 'score': 0.47298324}, {'id': 'https://openalex.org/C2777619693', 'wikidata': 'https://www.wikidata.org/wiki/Q539430', 'display_name': 'Nanotube', 'level': 3, 'score': 0.425972}, {'id': 'https://openalex.org/C64297162', 'wikidata': 'https://www.wikidata.org/wiki/Q1987070', 'display_name': 'Deposition (geology)', 'level': 3, 'score': 0.42318565}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.32595497}, {'id': 'https://openalex.org/C71924100', 'wikidata': 'https://www.wikidata.org/wiki/Q11190', 'display_name': 'Medicine', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C151730666', 'wikidata': 'https://www.wikidata.org/wiki/Q7205', 'display_name': 'Paleontology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C111368507', 'wikidata': 'https://www.wikidata.org/wiki/Q43518', 'display_name': 'Oceanography', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C204787440', 'wikidata': 'https://www.wikidata.org/wiki/Q188504', 'display_name': 'Alternative medicine', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C142724271', 'wikidata': 'https://www.wikidata.org/wiki/Q7208', 'display_name': 'Pathology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C2816523', 'wikidata': 'https://www.wikidata.org/wiki/Q180184', 'display_name': 'Sediment', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C127313418', 'wikidata': 'https://www.wikidata.org/wiki/Q1069', 'display_name': 'Geology', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C86803240', 'wikidata': 'https://www.wikidata.org/wiki/Q420', 'display_name': 'Biology', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 2, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1088/0957-4484/27/26/265301', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S206811868', 'display_name': 'Nanotechnology', 'issn_l': '0957-4484', 'issn': ['0957-4484', '1361-6528'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320083', 'host_organization_name': 'IOP Publishing', 'host_organization_lineage': ['https://openalex.org/P4310311669', 'https://openalex.org/P4310320083'], 'host_organization_lineage_names': ['Institute of Physics', 'IOP Publishing'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, {'is_oa': False, 'landing_page_url': 'https://pubmed.ncbi.nlm.nih.gov/27188268', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4306525036', 'display_name': 'PubMed', 'issn_l': None, 'issn': None, 'is_oa': False, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1299303238', 'host_organization_name': 'National Institutes of Health', 'host_organization_lineage': ['https://openalex.org/I1299303238'], 'host_organization_lineage_names': ['National Institutes of Health'], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [{'display_name': 'Industry, innovation and infrastructure', 'score': 0.51, 'id': 'https://metadata.un.org/sdg/9'}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 37, 'referenced_works': ['https://openalex.org/W1596715715', 'https://openalex.org/W1964312606', 'https://openalex.org/W1989555777', 'https://openalex.org/W1994831528', 'https://openalex.org/W1999082012', 'https://openalex.org/W2002251907', 'https://openalex.org/W2010202518', 'https://openalex.org/W2012356953', 'https://openalex.org/W2016636234', 'https://openalex.org/W2017657364', 'https://openalex.org/W2019163372', 'https://openalex.org/W2027020966', 'https://openalex.org/W2041890155', 'https://openalex.org/W2047133754', 'https://openalex.org/W2051170838', 'https://openalex.org/W2051431133', 'https://openalex.org/W2055205691', 'https://openalex.org/W2063456761', 'https://openalex.org/W2071056973', 'https://openalex.org/W2081362500', 'https://openalex.org/W2081875458', 'https://openalex.org/W2083655036', 'https://openalex.org/W2084544283', 'https://openalex.org/W2089779422', 'https://openalex.org/W2091882341', 'https://openalex.org/W2101210930', 'https://openalex.org/W2112083836', 'https://openalex.org/W2112907243', 'https://openalex.org/W2120491593', 'https://openalex.org/W2138896515', 'https://openalex.org/W2142639149', 'https://openalex.org/W2147662563', 'https://openalex.org/W2149032507', 'https://openalex.org/W2162336210', 'https://openalex.org/W2163216221', 'https://openalex.org/W2163339963', 'https://openalex.org/W2331937746'], 'related_works': ['https://openalex.org/W4240755120', 'https://openalex.org/W2913861815', 'https://openalex.org/W2385877031', 'https://openalex.org/W2381853949', 'https://openalex.org/W2375445966', 'https://openalex.org/W2046945814', 'https://openalex.org/W2017189043', 'https://openalex.org/W2012113316', 'https://openalex.org/W2004506311', 'https://openalex.org/W1565953738'], 'abstract_inverted_index': {'The': [0], 'fabrication': [1], 'of': [2, 6, 17, 55, 66, 97, 112], 'nanostructures': [3], 'having': [4, 52, 63, 94], 'diameters': [5], 'sub-5': [7, 31], 'nm': [8, 32, 59, 70, 101], 'is': [9], 'very': [10], 'a': [11, 25, 53, 64, 95, 131, 141], 'important': [12], 'issue': [13], 'for': [14, 127, 147], 'bottom-up': [15], 'nanofabrication': [16], 'nanoscale': [18], 'devices.': [19], 'In': [20, 105], 'this': [21], 'work,': [22], 'we': [23, 133], 'report': [24], 'highly': [26], 'controllable': [27], 'method': [28], 'to': [29, 107], 'create': [30], 'nano-trenches': [33, 51, 62], 'and': [34, 60], 'nanowires': [35, 93, 117], 'by': [36, 73, 86, 118], 'combining': [37], 'area-selective': [38], 'atomic': [39], 'layer': [40], 'deposition': [41], '(ALD)': [42], 'with': [43], 'single-walled': [44], 'carbon': [45], 'nanotubes': [46], '(SWNTs)': [47], 'as': [48], 'templates.': [49], 'Alumina': [50], 'depth': [54, 65], '2.6': [56], '∼': [57, 68, 99], '3.0': [58], 'SiO2': [61], '1.9': [67], '2.2': [69], 'fully': [71], 'guided': [72], 'the': [74, 109, 153], 'SWNTs': [75], 'have': [76, 102], 'been': [77, 103], 'formed': [78], 'on': [79], 'SiO2/Si': [80], 'substrate.': [81], 'Through': [82], 'infilling': [83], 'ZnO': [84, 92, 113, 116, 138], 'material': [85], 'ALD': [87, 119], 'in': [88, 125, 152], 'alumina': [89], 'nano-trenches,': [90], 'well-defined': [91], 'thickness': [96], '3.1': [98], '3.3': [100], 'fabricated.': [104], 'order': [106], 'improve': [108], 'electrical': [110], 'properties': [111], 'nanowires,': [114], 'as-fabricated': [115], 'were': [120], 'annealed': [121], 'at': [122], '350': [123], '°C': [124], 'air': [126], '60': [128], 'min.': [129], 'As': [130], 'result,': [132], 'successfully': [134], 'demonstrated': [135], 'that': [136], 'as-synthesized': [137], 'nanowire': [139], 'using': [140], 'specific': [142], 'template': [143], 'can': [144], 'be': [145], 'made': [146], 'various': [148], 'high-density': [149], 'resistive': [150], 'components': [151], 'nanoelectronics': [154], 'industry.': [155]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2402936723', 'counts_by_year': [{'year': 2021, 'cited_by_count': 1}, {'year': 2018, 'cited_by_count': 1}, {'year': 2017, 'cited_by_count': 1}], 'updated_date': '2024-12-11T21:18:01.368907', 'created_date': '2016-06-24'}