Title: Analysis of the Structure Characteristics of Quartz MEMS Gyroscope
Abstract: The principle and typical sensing elements structure of quartz MEMS gyroscope have been introduced in this paper.The structure characteristics of sensing elements have been analyzed,and the structure has been optimized by using the finite element method.The suitable electrode pattern has been designed by using the piezoelectric effect of quartz crystal.The quartz MEMS processing technology has been introduced based on the sensing elements structure.The performance of quartz MEMS gyroscope has been improved by optimizing the structure and designing the electrode pattern suitably.At last,the primary performance and application fields of quartz MEMS gyroscope have been introduced.
Publication Year: 2011
Publication Date: 2011-01-01
Language: en
Type: article
Access and Citation
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot