Title: Study of nanotribology of ultrathin diamond-like carbon (DLC) based on lateral force microscope (LFM)
Abstract: Nanotribology of untra-thin diamond-like carbon(DLC) coatings deposited by electron cyclotron resonance microwave plasma chemical vapor deposition(MP ECR-CVD) were analyzed by nanoscale friction tests using a lateral force microscope (LFM). These tests are concerned in effect of the stiction, applied load and micro-topography during the friction. The results show that friction force is direct proportional to applied load, although a stiction caused deflection exits, which can be described by a revised Amonton formula. Topography also plays an important role in nanoscale tribology of DLC coatings and the increase of contact peak inclination makes the micro friction coefficient higher. A formula concerning applied force, stiction and topography effects is given to describe the nanotribology of DLC coatings.
Publication Year: 2004
Publication Date: 2004-01-01
Language: en
Type: article
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