Title: Numerical Simulation of Trichlorosilane Hydrogen Reduction Process in Polysilicon Reduction Furnace
Abstract: A three-dimensional model of SHCl3hydrogen reduction process in polysilicon reduction furnace was proposed.The flow,heat transfer and chemical reaction process in a reduction furnace were simulated by a CFD software,and the change of deposition characteristic along with silicon rod height and silicon rod diameter was analyzed.The results show that the SiHCl3conversion rate,silicon production rate and silicon growth rate increase and the energy consumption decreases with increasing silicon rod height.Based on the reaction,the higher silicon rod height is better.The SiHCl3conversion rate and silicon production rate increase,the silicon growth rate firstly decreases and then increases,the energy consumption firstly decreases and then becomes stable with the increase of silicon rod diameter.In theory,the greater silicon rod diameter can give the better performance.The optimal silicon rod diameter is120mm.
Publication Year: 2014
Publication Date: 2014-01-01
Language: en
Type: article
Access and Citation
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot