Title: Simulation of trichlorosilane distillation process
Abstract: Aiming at reducing the cost of polysilicon distillation process,the process of removing heavy components after removal of light components and the process of removing light components after removal of heavy components for trichlorosilane distillation are studied. The results show,under the same feed composition,separation requirements and operating pressure,comprehensive heat duty of the latter process is 14. 5% larger than that of the former process. The reason is that the total heat duty of the column removing heavy components of the latter process is higher than that of the column removing heavy components of the former process because of the larger material flow and lower overhead temperature.
Publication Year: 2015
Publication Date: 2015-01-01
Language: en
Type: article
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