Title: Laser Chemical Vapour Deposition(LCVD)(III)
Abstract: The basic principles of laser chemical vapour deposition were introduced.The applied lasers,technological processes and properties of the deposited metal thin films,diamond thin films,diamond-like thin films,hydrogenated amorphous silicon thin films,compound semiconductor thin films and insulating thin films etc were described in details.
Publication Year: 2007
Publication Date: 2007-01-01
Language: en
Type: article
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