Title: Coupling control of actuators for MEMS-based deformable mirror
Abstract:Based on the correction of the residual error of wave-front correction,the relationship between the coupling of actuators and correction capability of MEMS-based deformable mirror(DM) is analyzed.When...Based on the correction of the residual error of wave-front correction,the relationship between the coupling of actuators and correction capability of MEMS-based deformable mirror(DM) is analyzed.When a single actuator of the continuous surface DM works,it creates a displacement at the other actuators,which is described using coupling coefficient(cc).For a MEMS-based DM with a 10×10 actuator array,with the distance between two adjacent actuators(b) being 3 mm,correcting the first 20 Zernike modes,the best coupling coefficient is 10%.Different distances between two adjacent actuators(b) correspond to different correction capabilities and different coupling coefficients.Corresponding to b of 2,2.5,3,3.5,and 4 mm,the best coupling coefficient of the DM is 12%,11%,10%,9%,and 8%,respectively.Read More
Publication Year: 2010
Publication Date: 2010-01-01
Language: en
Type: article
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