Title: Scanning probe microscopy for micro-geometry measurement
Abstract:With the development of microtechnology, the measurement of the geometry of microstructures with high accuracy becomes more and more important. Some of the techniques of scanning probe microscopy whic...With the development of microtechnology, the measurement of the geometry of microstructures with high accuracy becomes more and more important. Some of the techniques of scanning probe microscopy which are used for micro-geometry measurement are summarized and analyzed, including scanning tunneling microscopy,scanning near-field optical microscopy and atomic force microscopy.Read More
Publication Year: 2003
Publication Date: 2003-01-01
Language: en
Type: article
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