Title: Research on Carbon Nanotubes in Micro Electro-Mechanical System and Its Applications
Abstract:The research progress of carbon nanotubes offers a wide range of possibilities for the combination of carbon nanotubes and MEMS. The method combining bothTop-downandBottom-upis the trend of micro-nano...The research progress of carbon nanotubes offers a wide range of possibilities for the combination of carbon nanotubes and MEMS. The method combining bothTop-downandBottom-upis the trend of micro-nano technology.The basic characteristics of carbon nanotubes and their potential applications to MEMS are introduced. The fabricating technology of the carbon nanotubes and their compatibility with MEMS are summarized.The examples for the current research combining the carbon nanotubes with MEMS are given, and its developing trend is also analyzed.Read More
Publication Year: 2004
Publication Date: 2004-01-01
Language: en
Type: article
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