Publication Information

{'id': 'https://openalex.org/W2326279618', 'doi': 'https://doi.org/10.2493/jjspe1933.51.2190', 'title': 'Electron beam lithography system.', 'display_name': 'Electron beam lithography system.', 'publication_year': 1985, 'publication_date': '1985-01-01', 'ids': {'openalex': 'https://openalex.org/W2326279618', 'doi': 'https://doi.org/10.2493/jjspe1933.51.2190', 'mag': '2326279618'}, 'language': 'en', 'primary_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.2493/jjspe1933.51.2190', 'pdf_url': 'https://www.jstage.jst.go.jp/article/jjspe1933/51/12/51_12_2190/_pdf', 'source': {'id': 'https://openalex.org/S4210218965', 'display_name': 'Journal of the Japan Society of Precision Engineering', 'issn_l': '0374-3543', 'issn': ['0374-3543'], 'is_oa': False, 'is_in_doaj': False, 'is_indexed_in_scopus': False, 'is_core': False, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': True, 'oa_status': 'bronze', 'oa_url': 'https://www.jstage.jst.go.jp/article/jjspe1933/51/12/51_12_2190/_pdf', 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5044293673', 'display_name': 'Y. Shibata', 'orcid': None}, 'institutions': [], 'countries': [], 'is_corresponding': True, 'raw_author_name': 'YUKINOBU SHIBATA', 'raw_affiliation_strings': [], 'affiliations': []}], 'institution_assertions': [], 'countries_distinct_count': 0, 'institutions_distinct_count': 0, 'corresponding_author_ids': ['https://openalex.org/A5044293673'], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 0.0, 'has_fulltext': False, 'cited_by_count': 0, 'citation_normalized_percentile': {'value': 0.0, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 0, 'max': 54}, 'biblio': {'volume': '51', 'issue': '12', 'first_page': '2190', 'last_page': '2195'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.8966, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T11338', 'display_name': 'Advancements in Photolithography Techniques', 'score': 0.8966, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/stencil-lithography', 'display_name': 'Stencil lithography', 'score': 0.4747834}, {'id': 'https://openalex.org/keywords/next-generation-lithography', 'display_name': 'Next-generation lithography', 'score': 0.46268475}, {'id': 'https://openalex.org/keywords/maskless-lithography', 'display_name': 'Maskless lithography', 'score': 0.44321042}], 'concepts': [{'id': 'https://openalex.org/C200274948', 'wikidata': 'https://www.wikidata.org/wiki/Q256845', 'display_name': 'Electron-beam lithography', 'level': 4, 'score': 0.6312083}, {'id': 'https://openalex.org/C204223013', 'wikidata': 'https://www.wikidata.org/wiki/Q133036', 'display_name': 'Lithography', 'level': 2, 'score': 0.62326044}, {'id': 'https://openalex.org/C95312477', 'wikidata': 'https://www.wikidata.org/wiki/Q207340', 'display_name': 'Cathode ray', 'level': 3, 'score': 0.52711993}, {'id': 'https://openalex.org/C70520399', 'wikidata': 'https://www.wikidata.org/wiki/Q7607503', 'display_name': 'Stencil lithography', 'level': 5, 'score': 0.4747834}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.46489233}, {'id': 'https://openalex.org/C163581340', 'wikidata': 'https://www.wikidata.org/wiki/Q1983848', 'display_name': 'Next-generation lithography', 'level': 5, 'score': 0.46268475}, {'id': 'https://openalex.org/C41794268', 'wikidata': 'https://www.wikidata.org/wiki/Q1408939', 'display_name': 'X-ray lithography', 'level': 4, 'score': 0.44448143}, {'id': 'https://openalex.org/C137905882', 'wikidata': 'https://www.wikidata.org/wiki/Q6783445', 'display_name': 'Maskless lithography', 'level': 5, 'score': 0.44321042}, {'id': 'https://openalex.org/C53524968', 'wikidata': 'https://www.wikidata.org/wiki/Q7315582', 'display_name': 'Resist', 'level': 3, 'score': 0.35456508}, {'id': 'https://openalex.org/C120665830', 'wikidata': 'https://www.wikidata.org/wiki/Q14620', 'display_name': 'Optics', 'level': 1, 'score': 0.34849185}, {'id': 'https://openalex.org/C147120987', 'wikidata': 'https://www.wikidata.org/wiki/Q2225', 'display_name': 'Electron', 'level': 2, 'score': 0.30898118}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.29896408}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.29609045}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.29562554}, {'id': 'https://openalex.org/C185544564', 'wikidata': 'https://www.wikidata.org/wiki/Q81197', 'display_name': 'Nuclear physics', 'level': 1, 'score': 0.08728957}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': True, 'landing_page_url': 'https://doi.org/10.2493/jjspe1933.51.2190', 'pdf_url': 'https://www.jstage.jst.go.jp/article/jjspe1933/51/12/51_12_2190/_pdf', 'source': {'id': 'https://openalex.org/S4210218965', 'display_name': 'Journal of the Japan Society of Precision Engineering', 'issn_l': '0374-3543', 'issn': ['0374-3543'], 'is_oa': False, 'is_in_doaj': False, 'is_indexed_in_scopus': False, 'is_core': False, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'https://doi.org/10.2493/jjspe1933.51.2190', 'pdf_url': 'https://www.jstage.jst.go.jp/article/jjspe1933/51/12/51_12_2190/_pdf', 'source': {'id': 'https://openalex.org/S4210218965', 'display_name': 'Journal of the Japan Society of Precision Engineering', 'issn_l': '0374-3543', 'issn': ['0374-3543'], 'is_oa': False, 'is_in_doaj': False, 'is_indexed_in_scopus': False, 'is_core': False, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 0, 'referenced_works': [], 'related_works': ['https://openalex.org/W806091262', 'https://openalex.org/W4238142582', 'https://openalex.org/W2607007960', 'https://openalex.org/W2135099569', 'https://openalex.org/W2113684589', 'https://openalex.org/W2050323439', 'https://openalex.org/W2018375091', 'https://openalex.org/W2007880660', 'https://openalex.org/W1985666002', 'https://openalex.org/W1970458722'], 'abstract_inverted_index': None, 'abstract_inverted_index_v3': None, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2326279618', 'counts_by_year': [], 'updated_date': '2025-01-22T15:27:52.273833', 'created_date': '2016-06-24'}