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{'id': 'https://openalex.org/W2325503606', 'doi': 'https://doi.org/10.1116/1.4944632', 'title': 'SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering', 'display_name': 'SIMS depth profiling and topography studies of repetitive III–V trenches under low energy oxygen ion beam sputtering', 'publication_year': 2016, 'publication_date': '2016-03-25', 'ids': {'openalex': 'https://openalex.org/W2325503606', 'doi': 'https://doi.org/10.1116/1.4944632', 'mag': '2325503606'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1116/1.4944632', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4210235835', 'display_name': 'Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena', 'issn_l': '2166-2746', 'issn': ['2166-2746', '2166-2754'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': True, 'oa_status': 'green', 'oa_url': 'https://hal.univ-grenoble-alpes.fr/hal-01881953/document', 'any_repository_has_fulltext': True}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5079300349', 'display_name': 'Viktoriia Gorbenko', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I106785703', 'display_name': 'Institut polytechnique de Grenoble', 'ror': 'https://ror.org/05sbt2524', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I106785703', 'https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I899635006', 'display_name': 'Université Grenoble Alpes', 'ror': 'https://ror.org/02rx3b187', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I4210128684', 'display_name': 'Laboratoire des Technologies de la Microélectronique', 'ror': 'https://ror.org/036zswm25', 'country_code': 'FR', 'type': 'facility', 'lineage': ['https://openalex.org/I1294671590', 'https://openalex.org/I2738703131', 'https://openalex.org/I3020098449', 'https://openalex.org/I4210095849', 'https://openalex.org/I4210128684', 'https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I1294671590', 'display_name': 'Centre National de la Recherche Scientifique', 'ror': 'https://ror.org/02feahw73', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I1294671590']}, {'id': 'https://openalex.org/I2738703131', 'display_name': "Commissariat à l'Énergie Atomique et aux Énergies Alternatives", 'ror': 'https://ror.org/00jjx8s55', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I2738703131']}, {'id': 'https://openalex.org/I3020098449', 'display_name': 'CEA Grenoble', 'ror': 'https://ror.org/02mg6n827', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I2738703131', 'https://openalex.org/I3020098449']}], 'countries': ['FR'], 'is_corresponding': False, 'raw_author_name': 'Viktoriia Gorbenko', 'raw_affiliation_strings': ['CEA , F-38000 Grenoble, France ; , LETI, MINATEC Campus, F-38054 Grenoble, France; , LTM, F-38000 Grenoble, France ; and , LTM, F-38000 Grenoble, France', 'CNRS , F-38000 Grenoble, France ; , LETI, MINATEC Campus, F-38054 Grenoble, France; , LTM, F-38000 Grenoble, France ; and , LTM, F-38000 Grenoble, France', 'Univ. Grenoble Alpes , F-38000 Grenoble, France ; , LETI, MINATEC Campus, F-38054 Grenoble, France; , LTM, F-38000 Grenoble, France ; and , LTM, F-38000 Grenoble, France'], 'affiliations': [{'raw_affiliation_string': 'CEA , F-38000 Grenoble, France ; , LETI, MINATEC Campus, F-38054 Grenoble, France; , LTM, F-38000 Grenoble, France ; and , LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I106785703', 'https://openalex.org/I2738703131', 'https://openalex.org/I3020098449']}, {'raw_affiliation_string': 'Univ. Grenoble Alpes , F-38000 Grenoble, France ; , LETI, MINATEC Campus, F-38054 Grenoble, France; , LTM, F-38000 Grenoble, France ; and , LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I899635006', 'https://openalex.org/I106785703', 'https://openalex.org/I899635006', 'https://openalex.org/I106785703']}, {'raw_affiliation_string': 'CNRS , F-38000 Grenoble, France ; , LETI, MINATEC Campus, F-38054 Grenoble, France; , LTM, F-38000 Grenoble, France ; and , LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I4210128684', 'https://openalex.org/I1294671590', 'https://openalex.org/I106785703']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5065193249', 'display_name': 'F. Bassani', 'orcid': 'https://orcid.org/0000-0001-8688-1328'}, 'institutions': [{'id': 'https://openalex.org/I4210128684', 'display_name': 'Laboratoire des Technologies de la Microélectronique', 'ror': 'https://ror.org/036zswm25', 'country_code': 'FR', 'type': 'facility', 'lineage': ['https://openalex.org/I1294671590', 'https://openalex.org/I2738703131', 'https://openalex.org/I3020098449', 'https://openalex.org/I4210095849', 'https://openalex.org/I4210128684', 'https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I1294671590', 'display_name': 'Centre National de la Recherche Scientifique', 'ror': 'https://ror.org/02feahw73', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I1294671590']}, {'id': 'https://openalex.org/I899635006', 'display_name': 'Université Grenoble Alpes', 'ror': 'https://ror.org/02rx3b187', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I899635006']}], 'countries': ['FR'], 'is_corresponding': False, 'raw_author_name': 'Franck Bassani', 'raw_affiliation_strings': ['CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France'], 'affiliations': [{'raw_affiliation_string': 'CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I4210128684', 'https://openalex.org/I1294671590']}, {'raw_affiliation_string': 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I1294671590', 'https://openalex.org/I899635006']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5001787792', 'display_name': 'A. Merkulov', 'orcid': 'https://orcid.org/0000-0003-4101-0873'}, 'institutions': [{'id': 'https://openalex.org/I4210100195', 'display_name': 'Cameca (France)', 'ror': 'https://ror.org/01at47r33', 'country_code': 'FR', 'type': 'company', 'lineage': ['https://openalex.org/I4210100195']}], 'countries': ['FR'], 'is_corresponding': False, 'raw_author_name': 'Alexandre Merkulov', 'raw_affiliation_strings': ['CAMECA SAS , 29 Quai des Gresillons, 92622 Gennevilliers Cedex, France'], 'affiliations': [{'raw_affiliation_string': 'CAMECA SAS , 29 Quai des Gresillons, 92622 Gennevilliers Cedex, France', 'institution_ids': ['https://openalex.org/I4210100195']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5007473692', 'display_name': 'T. Baron', 'orcid': 'https://orcid.org/0000-0001-5005-6596'}, 'institutions': [{'id': 'https://openalex.org/I1294671590', 'display_name': 'Centre National de la Recherche Scientifique', 'ror': 'https://ror.org/02feahw73', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I1294671590']}, {'id': 'https://openalex.org/I4210128684', 'display_name': 'Laboratoire des Technologies de la Microélectronique', 'ror': 'https://ror.org/036zswm25', 'country_code': 'FR', 'type': 'facility', 'lineage': ['https://openalex.org/I1294671590', 'https://openalex.org/I2738703131', 'https://openalex.org/I3020098449', 'https://openalex.org/I4210095849', 'https://openalex.org/I4210128684', 'https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I899635006', 'display_name': 'Université Grenoble Alpes', 'ror': 'https://ror.org/02rx3b187', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I899635006']}], 'countries': ['FR'], 'is_corresponding': False, 'raw_author_name': 'Thierry Baron', 'raw_affiliation_strings': ['CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France'], 'affiliations': [{'raw_affiliation_string': 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I1294671590', 'https://openalex.org/I899635006']}, {'raw_affiliation_string': 'CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I4210128684', 'https://openalex.org/I1294671590']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5038390940', 'display_name': 'M. Martin', 'orcid': 'https://orcid.org/0000-0001-8946-5194'}, 'institutions': [{'id': 'https://openalex.org/I1294671590', 'display_name': 'Centre National de la Recherche Scientifique', 'ror': 'https://ror.org/02feahw73', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I1294671590']}, {'id': 'https://openalex.org/I4210128684', 'display_name': 'Laboratoire des Technologies de la Microélectronique', 'ror': 'https://ror.org/036zswm25', 'country_code': 'FR', 'type': 'facility', 'lineage': ['https://openalex.org/I1294671590', 'https://openalex.org/I2738703131', 'https://openalex.org/I3020098449', 'https://openalex.org/I4210095849', 'https://openalex.org/I4210128684', 'https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I899635006', 'display_name': 'Université Grenoble Alpes', 'ror': 'https://ror.org/02rx3b187', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I899635006']}], 'countries': ['FR'], 'is_corresponding': False, 'raw_author_name': 'Mickael Martin', 'raw_affiliation_strings': ['CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France'], 'affiliations': [{'raw_affiliation_string': 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I1294671590', 'https://openalex.org/I899635006']}, {'raw_affiliation_string': 'CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I4210128684', 'https://openalex.org/I1294671590']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5106430482', 'display_name': 'Sylvain David', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I1294671590', 'display_name': 'Centre National de la Recherche Scientifique', 'ror': 'https://ror.org/02feahw73', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I1294671590']}, {'id': 'https://openalex.org/I4210128684', 'display_name': 'Laboratoire des Technologies de la Microélectronique', 'ror': 'https://ror.org/036zswm25', 'country_code': 'FR', 'type': 'facility', 'lineage': ['https://openalex.org/I1294671590', 'https://openalex.org/I2738703131', 'https://openalex.org/I3020098449', 'https://openalex.org/I4210095849', 'https://openalex.org/I4210128684', 'https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I899635006', 'display_name': 'Université Grenoble Alpes', 'ror': 'https://ror.org/02rx3b187', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I899635006']}], 'countries': ['FR'], 'is_corresponding': False, 'raw_author_name': 'Sylvain David', 'raw_affiliation_strings': ['CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France'], 'affiliations': [{'raw_affiliation_string': 'Univ. Grenoble Alpes, LTM, F-38000 Grenoble, France and CNRS, LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I1294671590', 'https://openalex.org/I899635006']}, {'raw_affiliation_string': 'CNRS , LTM, F-38000 Grenoble, France and , LTM, F-38000 Grenoble, France', 'institution_ids': ['https://openalex.org/I4210128684', 'https://openalex.org/I1294671590']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5065336654', 'display_name': 'Jean‐Paul Barnes', 'orcid': 'https://orcid.org/0000-0002-6547-6849'}, 'institutions': [{'id': 'https://openalex.org/I106785703', 'display_name': 'Institut polytechnique de Grenoble', 'ror': 'https://ror.org/05sbt2524', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I106785703', 'https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I3020098449', 'display_name': 'CEA Grenoble', 'ror': 'https://ror.org/02mg6n827', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I2738703131', 'https://openalex.org/I3020098449']}, {'id': 'https://openalex.org/I2738703131', 'display_name': "Commissariat à l'Énergie Atomique et aux Énergies Alternatives", 'ror': 'https://ror.org/00jjx8s55', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I2738703131']}, {'id': 'https://openalex.org/I899635006', 'display_name': 'Université Grenoble Alpes', 'ror': 'https://ror.org/02rx3b187', 'country_code': 'FR', 'type': 'education', 'lineage': ['https://openalex.org/I899635006']}, {'id': 'https://openalex.org/I4210150049', 'display_name': 'CEA LETI', 'ror': 'https://ror.org/04mf0wv34', 'country_code': 'FR', 'type': 'government', 'lineage': ['https://openalex.org/I2738703131', 'https://openalex.org/I4210117989', 'https://openalex.org/I4210150049']}], 'countries': ['FR'], 'is_corresponding': False, 'raw_author_name': 'Jean-Paul Barnes', 'raw_affiliation_strings': ['CEA , F-38000 Grenoble, France and , LETI, MINATEC Campus, F-38054 Grenoble, France', 'Univ. Grenoble Alpes, F-38000 Grenoble, France and CEA, LETI, MINATEC Campus, F-38054 Grenoble, France'], 'affiliations': [{'raw_affiliation_string': 'Univ. Grenoble Alpes, F-38000 Grenoble, France and CEA, LETI, MINATEC Campus, F-38054 Grenoble, France', 'institution_ids': ['https://openalex.org/I106785703', 'https://openalex.org/I3020098449', 'https://openalex.org/I2738703131', 'https://openalex.org/I899635006', 'https://openalex.org/I4210150049']}, {'raw_affiliation_string': 'CEA , F-38000 Grenoble, France and , LETI, MINATEC Campus, F-38054 Grenoble, France', 'institution_ids': ['https://openalex.org/I3020098449', 'https://openalex.org/I899635006', 'https://openalex.org/I106785703', 'https://openalex.org/I2738703131']}]}], 'countries_distinct_count': 1, 'institutions_distinct_count': 8, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 0.0, 'has_fulltext': True, 'fulltext_origin': 'pdf', 'cited_by_count': 1, 'citation_normalized_percentile': {'value': 0.0, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 67, 'max': 74}, 'biblio': {'volume': '34', 'issue': '3', 'first_page': None, 'last_page': None}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T12166', 'display_name': 'Ion Beam Surface Analysis and Nanoscale Patterning', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2206', 'display_name': 'Computational Mechanics'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T12166', 'display_name': 'Ion Beam Surface Analysis and Nanoscale Patterning', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2206', 'display_name': 'Computational Mechanics'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T14117', 'display_name': 'Failure Analysis of Integrated Circuits', 'score': 0.9983, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10472', 'display_name': 'Atomic Layer Deposition Technology', 'score': 0.9932, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/secondary-ion-mass-spectrometry', 'display_name': 'Secondary Ion Mass Spectrometry', 'score': 0.545761}, {'id': 'https://openalex.org/keywords/surface-analysis', 'display_name': 'Surface Analysis', 'score': 0.53326}], 'concepts': [{'id': 'https://openalex.org/C22423302', 'wikidata': 'https://www.wikidata.org/wiki/Q898444', 'display_name': 'Sputtering', 'level': 3, 'score': 0.7917656}, {'id': 'https://openalex.org/C77671233', 'wikidata': 'https://www.wikidata.org/wiki/Q556046', 'display_name': 'Secondary ion mass spectrometry', 'level': 3, 'score': 0.76662123}, {'id': 'https://openalex.org/C50774322', 'wikidata': 'https://www.wikidata.org/wiki/Q644248', 'display_name': 'Ion beam', 'level': 3, 'score': 0.57354355}, {'id': 'https://openalex.org/C540031477', 'wikidata': 'https://www.wikidata.org/wiki/Q629', 'display_name': 'Oxygen', 'level': 2, 'score': 0.53886664}, {'id': 'https://openalex.org/C145148216', 'wikidata': 'https://www.wikidata.org/wiki/Q36496', 'display_name': 'Ion', 'level': 2, 'score': 0.5207565}, {'id': 'https://openalex.org/C71039073', 'wikidata': 'https://www.wikidata.org/wiki/Q3439090', 'display_name': 'Surface finish', 'level': 2, 'score': 0.47548023}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.4717515}, {'id': 'https://openalex.org/C113196181', 'wikidata': 'https://www.wikidata.org/wiki/Q485223', 'display_name': 'Analytical Chemistry (journal)', 'level': 2, 'score': 0.47155023}, {'id': 'https://openalex.org/C107365816', 'wikidata': 'https://www.wikidata.org/wiki/Q114817', 'display_name': 'Surface roughness', 'level': 2, 'score': 0.41082346}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.3384127}, {'id': 'https://openalex.org/C19067145', 'wikidata': 'https://www.wikidata.org/wiki/Q1137203', 'display_name': 'Thin film', 'level': 2, 'score': 0.17060742}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.13089857}, {'id': 'https://openalex.org/C178790620', 'wikidata': 'https://www.wikidata.org/wiki/Q11351', 'display_name': 'Organic chemistry', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C43617362', 'wikidata': 'https://www.wikidata.org/wiki/Q170050', 'display_name': 'Chromatography', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C159985019', 'wikidata': 'https://www.wikidata.org/wiki/Q181790', 'display_name': 'Composite material', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 4, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1116/1.4944632', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S4210235835', 'display_name': 'Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena', 'issn_l': '2166-2746', 'issn': ['2166-2746', '2166-2754'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': None, 'host_organization_name': None, 'host_organization_lineage': [], 'host_organization_lineage_names': [], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, {'is_oa': True, 'landing_page_url': 'http://hal.univ-grenoble-alpes.fr/hal-01881953', 'pdf_url': 'https://hal.univ-grenoble-alpes.fr/hal-01881953/document', 'source': {'id': 'https://openalex.org/S4306402512', 'display_name': 'HAL (Le Centre pour la Communication Scientifique Directe)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1294671590', 'host_organization_name': 'Centre National de la Recherche Scientifique', 'host_organization_lineage': ['https://openalex.org/I1294671590'], 'host_organization_lineage_names': ['Centre National de la Recherche Scientifique'], 'type': 'repository'}, 'license': 'mit', 'license_id': 'https://openalex.org/licenses/mit', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, {'is_oa': False, 'landing_page_url': 'https://hal.univ-grenoble-alpes.fr/hal-01881953', 'pdf_url': None, 'source': None, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, {'is_oa': True, 'landing_page_url': 'https://hal.univ-grenoble-alpes.fr/hal-01881953/file/Gorbenko2016.pdf', 'pdf_url': 'https://hal.univ-grenoble-alpes.fr/hal-01881953/file/Gorbenko2016.pdf', 'source': {'id': 'https://openalex.org/S4306402512', 'display_name': 'HAL (Le Centre pour la Communication Scientifique Directe)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1294671590', 'host_organization_name': 'Centre National de la Recherche Scientifique', 'host_organization_lineage': ['https://openalex.org/I1294671590'], 'host_organization_lineage_names': ['Centre National de la Recherche Scientifique'], 'type': 'repository'}, 'license': None, 'license_id': None, 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}], 'best_oa_location': {'is_oa': True, 'landing_page_url': 'http://hal.univ-grenoble-alpes.fr/hal-01881953', 'pdf_url': 'https://hal.univ-grenoble-alpes.fr/hal-01881953/document', 'source': {'id': 'https://openalex.org/S4306402512', 'display_name': 'HAL (Le Centre pour la Communication Scientifique Directe)', 'issn_l': None, 'issn': None, 'is_oa': True, 'is_in_doaj': False, 'is_core': False, 'host_organization': 'https://openalex.org/I1294671590', 'host_organization_name': 'Centre National de la Recherche Scientifique', 'host_organization_lineage': ['https://openalex.org/I1294671590'], 'host_organization_lineage_names': ['Centre National de la Recherche Scientifique'], 'type': 'repository'}, 'license': 'mit', 'license_id': 'https://openalex.org/licenses/mit', 'version': 'publishedVersion', 'is_accepted': True, 'is_published': True}, 'sustainable_development_goals': [{'id': 'https://metadata.un.org/sdg/7', 'score': 0.41, 'display_name': 'Affordable and clean energy'}], 'grants': [{'funder': 'https://openalex.org/F4320320883', 'funder_display_name': 'Agence Nationale de la Recherche', 'award_id': 'LabEx Minos ANR-10-LABX-55-01'}], 'datasets': [], 'versions': [], 'referenced_works_count': 9, 'referenced_works': ['https://openalex.org/W1783903966', 'https://openalex.org/W1923006977', 'https://openalex.org/W1984772856', 'https://openalex.org/W1987907891', 'https://openalex.org/W1989953436', 'https://openalex.org/W1995692721', 'https://openalex.org/W2047367288', 'https://openalex.org/W2065502367', 'https://openalex.org/W2069407006'], 'related_works': ['https://openalex.org/W4313638943', 'https://openalex.org/W4304014137', 'https://openalex.org/W4297916609', 'https://openalex.org/W3133982275', 'https://openalex.org/W3034740403', 'https://openalex.org/W2900649910', 'https://openalex.org/W2386922414', 'https://openalex.org/W2349732462', 'https://openalex.org/W2032025132', 'https://openalex.org/W1966522691'], 'abstract_inverted_index': {'Chemical': [0], 'depth': [1, 32, 62, 93], 'profiling': [2, 94], 'of': [3, 34, 37, 78, 83, 95], 'III–V': [4], 'trenches': [5, 91], 'containing': [6], 'InGaAs': [7], 'quantum': [8], 'wells': [9], 'with': [10, 87], 'AlAs': [11], 'barriers': [12], 'selectively': [13], 'grown': [14], 'inside': [15], 'SiO2': [16], 'cavities': [17], 'was': [18, 64], 'studied': [19], 'using': [20, 98], 'magnetic': [21], 'secondary': [22], 'ion': [23, 85], 'mass': [24], 'spectrometry': [25], '(SIMS).': [26], 'The': [27], 'authors': [28, 74], 'show': [29], 'that': [30], 'the': [31, 68, 73, 76, 84, 90], 'resolution': [33, 63], 'SIMS': [35, 61], 'profiles': [36], 'III-As': [38, 96], 'layers': [39, 97], 'degrades': [40], 'under': [41], 'extremely': [42], 'low': [43], 'energy': [44], 'oxygen': [45], 'beam': [46, 86], 'sputtering': [47], '(<500': [48], 'eV)': [49], 'due': [50], 'to': [51, 89], 'ripple': [52], 'formation': [53], 'and': [54, 81], 'an': [55], 'increase': [56], 'in': [57], 'surface': [58], 'roughness.': [59], 'Improved': [60], 'observed': [65], 'by': [66], 'increasing': [67], 'incident': [69], 'angle': [70], '(∼50°–65°).': [71], 'Finally,': [72], 'report': [75], 'effect': [77], 'sample': [79], 'rotation': [80], 'orientation': [82], 'respect': [88], 'on': [92], 'time-of-flight': [99], 'SIMS.': [100]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2325503606', 'counts_by_year': [{'year': 2024, 'cited_by_count': 1}], 'updated_date': '2024-09-09T22:48:10.653917', 'created_date': '2016-06-24'}