Title: Study on High-precision 2-Dimensional Length and Angle Measurement Technology and Traceability
Abstract:This paper describes the development of the 2-dimensional high-precision length measurement principle for accurate evaluation of a disk and the angle measurement technology for an angle sensor in an a...This paper describes the development of the 2-dimensional high-precision length measurement principle for accurate evaluation of a disk and the angle measurement technology for an angle sensor in an angle standard system. The 2-dimensional length was measured for an area of 150mm square with a high-precision accuracy of 0.1μm. A high-precision measuring instrument which evaluates the angle accuracy of an angle sensor and a disk was developed. The resolution of the angle calibration system is 0.001 seconds, and its reproducibility is 0.004 seconds. Measurement evaluation of an angle sensor and the disk accuracy was achieved.Read More