Title: Structural characterization using the multiple scattering effects in GISAXS
Abstract: MSMicrosymposia specimen placed at the focus in a geometry that the glancing angle in the vertical direction is the same for all the X-ray components, and they are reflected in the vertical direction by the surface and diverge in the horizontal plane.The perpendicular momentum transfer, given by q=4πsinθ/ λ, continuously changes as a function of the ray direction even with the fixed glancing angle θ since the wavelength (energy) λ changes.The X-ray intensity distribution across the beam direction measured downstream of the specimen using a o n e -d i m e n s i o n a l detector represents the X-ray reflectivity curve.Some results of static and dynamic measurements will b e r e p o r t e d , a n d the characteristics and potentials of the method will be discussed.