Abstract: Ruthenium nanocrystals were grown by PEALD using Ru(EtCp)₂ as precursor for nonvolatile memory applications. Maximum nanocrystal density of 2.5*10¹²㎝?², diameter of 2~4㎚ can be obtained. Charging characteristics of Ru nanocrystal structure has been investigated by capacitance-voltage (C-V) curve analysis. Also retention characteristics of nanocrystal memory structure have been studied. Judging from these results, Ru nanocrystal memory can be used as next-generation nonvolatile memory.
Publication Year: 2007
Publication Date: 2007-11-01
Language: en
Type: article
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