Title: A monolithically integrated multi-sensor platform
Abstract: The integration of multiple sensors on a single substrate is reported in this paper. A test chip was designed using the integration platform that implemented a capacitive inertial sensor, a capacitive absolute pressure sensor and a capacitive microphone. The sensors were tested after fabrication with the measured acceleration sensitivity of 10fF/g for a full scale acceleration of 2g and the pressure sensor sensitivity of 10fF/KPa for a full scale pressure of 1 atmosphere.
Publication Year: 2015
Publication Date: 2015-11-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 3
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