Title: Electrical characteristics and plasma diagnostics of (Ar/O 2 ) gas mixture glow Discharge
Abstract:The oxygen plasma has many important applications in the semiconductor industry. When addition a small amount of oxygen gas can significantly change the plasma characteristics, In this paper, The curr...The oxygen plasma has many important applications in the semiconductor industry. When addition a small amount of oxygen gas can significantly change the plasma characteristics, In this paper, The current –volt, characteristic curve and breakdown potential have been measured at different O2 percentage in (Ar/O2) gas mixture, the measurements show that the addition of oxygen leads to decrease in the discharge current at the same discharge voltage and gas pressure. Contrary, the lower breakdown potential at lower O2 percentage the minimum breakdown voltages were found (320 , , 347, 370, 400 )volt at (10%, 50%, 75%, 100% )O2 percentage respectively. The electron temperature and density calculated from I-V curve of single Langmuir probe at pressure (0.14) mbar for different O2 percentage. We observed two different groups of electrons characterized by different temperature and density, the result showed that the electron temperature increase with the addition of O2. While, the electron density decreased with increase percentage O2.Read More
Publication Year: 2014
Publication Date: 2014-01-01
Language: en
Type: article
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Cited By Count: 4
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