Title: CVD in Hot Wall Reactors—The Interaction Between Homogeneous Gas-Phase and Heterogeneous Surface Reactions
Abstract: Chemical Vapor DepositionVolume 4, Issue 4 p. 151-158 Full Paper CVD in Hot Wall Reactors—The Interaction Between Homogeneous Gas-Phase and Heterogeneous Surface Reactions Klaus J. Hüttinger, Klaus J. HüttingerSearch for more papers by this author Klaus J. Hüttinger, Klaus J. HüttingerSearch for more papers by this author First published: 20 September 2007 https://doi.org/10.1002/(SICI)1521-3862(199807)04:04<151::AID-CVDE151>3.0.CO;2-2Citations: 111AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinked InRedditWechat Abstract The paper is concerned with chemical vapor deposition in hot wall reactors and in particular with the interaction of homogeneous gas-phase and heterogeneous surface reactions. Based on model considerations it is shown that this interaction has a tremendous influence on the deposition chemistry and kinetics in all cases in which the precursor gas undergoes complex gas-phase reactions. The decisive parameter determining the interaction is given by the ratio of free volume of the deposition space and size of the surface area of the substrate; it is termed the "third parameter" of chemical vapor deposition. Predictions from the model are experimentally confirmed using results on chemical vapor deposition of pyrolytic carbon from methane. The importance of this "third parameter" of chemical vapor deposition in investigations of kinetics and for technical processes of chemical vapor deposition and infiltration is discussed in the conclusion. Citing Literature Volume4, Issue4July 1998Pages 151-158 RelatedInformation
Publication Year: 1998
Publication Date: 1998-07-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 122
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