Get quick answers to your questions about the article from our AI researcher chatbot
{'id': 'https://openalex.org/W2149128480', 'doi': 'https://doi.org/10.1109/5.704269', 'title': 'Micromachined inertial sensors', 'display_name': 'Micromachined inertial sensors', 'publication_year': 1998, 'publication_date': '1998-01-01', 'ids': {'openalex': 'https://openalex.org/W2149128480', 'doi': 'https://doi.org/10.1109/5.704269', 'mag': '2149128480'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/5.704269', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S68686220', 'display_name': 'Proceedings of the IEEE', 'issn_l': '0018-9219', 'issn': ['0018-9219', '1558-2256'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319808', 'host_organization_name': 'Institute of Electrical and Electronics Engineers', 'host_organization_lineage': ['https://openalex.org/P4310319808'], 'host_organization_lineage_names': ['Institute of Electrical and Electronics Engineers'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5062563579', 'display_name': 'N. Yazdi', 'orcid': None}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'N. Yazdi', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5081523432', 'display_name': 'Farrokh Ayazi', 'orcid': 'https://orcid.org/0000-0002-4539-7393'}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'F. Ayazi', 'raw_affiliation_strings': [], 'affiliations': []}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5030810852', 'display_name': 'K. Najafi', 'orcid': None}, 'institutions': [], 'countries': [], 'is_corresponding': False, 'raw_author_name': 'K. Najafi', 'raw_affiliation_strings': [], 'affiliations': []}], 'institution_assertions': [], 'countries_distinct_count': 0, 'institutions_distinct_count': 0, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 25.76, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 1743, 'citation_normalized_percentile': {'value': 0.988964, 'is_in_top_1_percent': False, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 99, 'max': 100}, 'biblio': {'volume': '86', 'issue': '8', 'first_page': '1640', 'last_page': '1659'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10369', 'display_name': 'Microelectromechanical Systems', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10369', 'display_name': 'Microelectromechanical Systems', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11449', 'display_name': 'Cavity Optomechanics and Nanomechanical Systems', 'score': 0.9992, 'subfield': {'id': 'https://openalex.org/subfields/3107', 'display_name': 'Atomic and Molecular Physics, and Optics'}, 'field': {'id': 'https://openalex.org/fields/31', 'display_name': 'Physics and Astronomy'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10205', 'display_name': 'Fiber Optic Sensor Technology', 'score': 0.9987, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/sensors', 'display_name': 'Sensors', 'score': 0.542957}, {'id': 'https://openalex.org/keywords/sensor-technology', 'display_name': 'Sensor Technology', 'score': 0.503879}], 'concepts': [{'id': 'https://openalex.org/C158488048', 'wikidata': 'https://www.wikidata.org/wiki/Q483400', 'display_name': 'Gyroscope', 'level': 2, 'score': 0.8812732}, {'id': 'https://openalex.org/C89805583', 'wikidata': 'https://www.wikidata.org/wiki/Q192940', 'display_name': 'Accelerometer', 'level': 2, 'score': 0.7416698}, {'id': 'https://openalex.org/C79061980', 'wikidata': 'https://www.wikidata.org/wiki/Q941680', 'display_name': 'Inertial measurement unit', 'level': 2, 'score': 0.67988336}, {'id': 'https://openalex.org/C2780625559', 'wikidata': 'https://www.wikidata.org/wiki/Q5152592', 'display_name': 'Commercialization', 'level': 2, 'score': 0.6300825}, {'id': 'https://openalex.org/C173386949', 'wikidata': 'https://www.wikidata.org/wiki/Q192735', 'display_name': 'Inertial frame of reference', 'level': 2, 'score': 0.616144}, {'id': 'https://openalex.org/C138331895', 'wikidata': 'https://www.wikidata.org/wiki/Q11650', 'display_name': 'Electronics', 'level': 2, 'score': 0.54697615}, {'id': 'https://openalex.org/C136525101', 'wikidata': 'https://www.wikidata.org/wiki/Q5428139', 'display_name': 'Fabrication', 'level': 3, 'score': 0.54035544}, {'id': 'https://openalex.org/C145667562', 'wikidata': 'https://www.wikidata.org/wiki/Q7646003', 'display_name': 'Surface micromachining', 'level': 4, 'score': 0.47636342}, {'id': 'https://openalex.org/C128651787', 'wikidata': 'https://www.wikidata.org/wiki/Q570607', 'display_name': 'Inertial navigation system', 'level': 3, 'score': 0.47492084}, {'id': 'https://openalex.org/C127413603', 'wikidata': 'https://www.wikidata.org/wiki/Q11023', 'display_name': 'Engineering', 'level': 0, 'score': 0.4695692}, {'id': 'https://openalex.org/C119599485', 'wikidata': 'https://www.wikidata.org/wiki/Q43035', 'display_name': 'Electrical engineering', 'level': 1, 'score': 0.45713907}, {'id': 'https://openalex.org/C37977207', 'wikidata': 'https://www.wikidata.org/wiki/Q175561', 'display_name': 'Microelectromechanical systems', 'level': 2, 'score': 0.4547675}, {'id': 'https://openalex.org/C41008148', 'wikidata': 'https://www.wikidata.org/wiki/Q21198', 'display_name': 'Computer science', 'level': 0, 'score': 0.40567842}, {'id': 'https://openalex.org/C171146098', 'wikidata': 'https://www.wikidata.org/wiki/Q124192', 'display_name': 'Automotive engineering', 'level': 1, 'score': 0.39873314}, {'id': 'https://openalex.org/C24326235', 'wikidata': 'https://www.wikidata.org/wiki/Q126095', 'display_name': 'Electronic engineering', 'level': 1, 'score': 0.3403315}, {'id': 'https://openalex.org/C78519656', 'wikidata': 'https://www.wikidata.org/wiki/Q101333', 'display_name': 'Mechanical engineering', 'level': 1, 'score': 0.32183874}, {'id': 'https://openalex.org/C146978453', 'wikidata': 'https://www.wikidata.org/wiki/Q3798668', 'display_name': 'Aerospace engineering', 'level': 1, 'score': 0.2951845}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.1841535}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.15447587}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.13183293}, {'id': 'https://openalex.org/C111919701', 'wikidata': 'https://www.wikidata.org/wiki/Q9135', 'display_name': 'Operating system', 'level': 1, 'score': 0.06883186}, {'id': 'https://openalex.org/C71924100', 'wikidata': 'https://www.wikidata.org/wiki/Q11190', 'display_name': 'Medicine', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C204787440', 'wikidata': 'https://www.wikidata.org/wiki/Q188504', 'display_name': 'Alternative medicine', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C142724271', 'wikidata': 'https://www.wikidata.org/wiki/Q7208', 'display_name': 'Pathology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C62520636', 'wikidata': 'https://www.wikidata.org/wiki/Q944', 'display_name': 'Quantum mechanics', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C199539241', 'wikidata': 'https://www.wikidata.org/wiki/Q7748', 'display_name': 'Law', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C17744445', 'wikidata': 'https://www.wikidata.org/wiki/Q36442', 'display_name': 'Political science', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/5.704269', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S68686220', 'display_name': 'Proceedings of the IEEE', 'issn_l': '0018-9219', 'issn': ['0018-9219', '1558-2256'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319808', 'host_organization_name': 'Institute of Electrical and Electronics Engineers', 'host_organization_lineage': ['https://openalex.org/P4310319808'], 'host_organization_lineage_names': ['Institute of Electrical and Electronics Engineers'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [{'id': 'https://metadata.un.org/sdg/7', 'score': 0.57, 'display_name': 'Affordable and clean energy'}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 125, 'referenced_works': ['https://openalex.org/W123268319', 'https://openalex.org/W1490888517', 'https://openalex.org/W1497523522', 'https://openalex.org/W1509808202', 'https://openalex.org/W1533613050', 'https://openalex.org/W1567208681', 'https://openalex.org/W1574079838', 'https://openalex.org/W1578247589', 'https://openalex.org/W1595396794', 'https://openalex.org/W1665940140', 'https://openalex.org/W1824802372', 'https://openalex.org/W1869177441', 'https://openalex.org/W1895489578', 'https://openalex.org/W1897140065', 'https://openalex.org/W1913017224', 'https://openalex.org/W1948193777', 'https://openalex.org/W1956160826', 'https://openalex.org/W1968521524', 'https://openalex.org/W1972282162', 'https://openalex.org/W1974607353', 'https://openalex.org/W1975593130', 'https://openalex.org/W1977834858', 'https://openalex.org/W1979815857', 'https://openalex.org/W1981440249', 'https://openalex.org/W1981487553', 'https://openalex.org/W1987780641', 'https://openalex.org/W1991534425', 'https://openalex.org/W1991765443', 'https://openalex.org/W1991925581', 'https://openalex.org/W1999194995', 'https://openalex.org/W2003469080', 'https://openalex.org/W2004776202', 'https://openalex.org/W2020307756', 'https://openalex.org/W2024914134', 'https://openalex.org/W2028246488', 'https://openalex.org/W2030389060', 'https://openalex.org/W2030669080', 'https://openalex.org/W2038064344', 'https://openalex.org/W2049199634', 'https://openalex.org/W2052038318', 'https://openalex.org/W2055759100', 'https://openalex.org/W2062146378', 'https://openalex.org/W2069389513', 'https://openalex.org/W2069612506', 'https://openalex.org/W2075831054', 'https://openalex.org/W2083431340', 'https://openalex.org/W2084171456', 'https://openalex.org/W2086173245', 'https://openalex.org/W2088624854', 'https://openalex.org/W2090051501', 'https://openalex.org/W2090524419', 'https://openalex.org/W2092119034', 'https://openalex.org/W2096017647', 'https://openalex.org/W2096509410', 'https://openalex.org/W2098080082', 'https://openalex.org/W2098591473', 'https://openalex.org/W2101365483', 'https://openalex.org/W2102162901', 'https://openalex.org/W2103983729', 'https://openalex.org/W2104089452', 'https://openalex.org/W2105371766', 'https://openalex.org/W2106034437', 'https://openalex.org/W2106627923', 'https://openalex.org/W2108102618', 'https://openalex.org/W2109461108', 'https://openalex.org/W2109739410', 'https://openalex.org/W2114789390', 'https://openalex.org/W2115469479', 'https://openalex.org/W2115472321', 'https://openalex.org/W2119124979', 'https://openalex.org/W2120839776', 'https://openalex.org/W2123106353', 'https://openalex.org/W2124319841', 'https://openalex.org/W2124463508', 'https://openalex.org/W2127054426', 'https://openalex.org/W2127390581', 'https://openalex.org/W2130700751', 'https://openalex.org/W2132190766', 'https://openalex.org/W2132351550', 'https://openalex.org/W2132847907', 'https://openalex.org/W2133019805', 'https://openalex.org/W2133644586', 'https://openalex.org/W2134732074', 'https://openalex.org/W2135695382', 'https://openalex.org/W2138323391', 'https://openalex.org/W2139976966', 'https://openalex.org/W2146552095', 'https://openalex.org/W2146619509', 'https://openalex.org/W2147705630', 'https://openalex.org/W2149871666', 'https://openalex.org/W2152016751', 'https://openalex.org/W2155503945', 'https://openalex.org/W2156668337', 'https://openalex.org/W2158897687', 'https://openalex.org/W2159761388', 'https://openalex.org/W2163794580', 'https://openalex.org/W2163830127', 'https://openalex.org/W2164514811', 'https://openalex.org/W2168649799', 'https://openalex.org/W2169662285', 'https://openalex.org/W2170026379', 'https://openalex.org/W2171405303', 'https://openalex.org/W2184874941', 'https://openalex.org/W2470954425', 'https://openalex.org/W2535713897', 'https://openalex.org/W2537791463', 'https://openalex.org/W2563505887', 'https://openalex.org/W2570493520', 'https://openalex.org/W3022141586', 'https://openalex.org/W3118494584', 'https://openalex.org/W3118641939', 'https://openalex.org/W3119934200', 'https://openalex.org/W3120346404', 'https://openalex.org/W3120865979', 'https://openalex.org/W3121081574', 'https://openalex.org/W4229499112', 'https://openalex.org/W4236542591', 'https://openalex.org/W4240605038', 'https://openalex.org/W4254323856', 'https://openalex.org/W4255093011', 'https://openalex.org/W4285719527', 'https://openalex.org/W4298024521', 'https://openalex.org/W45017184', 'https://openalex.org/W625190106', 'https://openalex.org/W631073711'], 'related_works': ['https://openalex.org/W4287084017', 'https://openalex.org/W4238176532', 'https://openalex.org/W3208523813', 'https://openalex.org/W3195533899', 'https://openalex.org/W3179745820', 'https://openalex.org/W2545638156', 'https://openalex.org/W2359095091', 'https://openalex.org/W2188647373', 'https://openalex.org/W2061166944', 'https://openalex.org/W1973973903'], 'abstract_inverted_index': {'This': [0, 88], 'paper': [1], 'presents': [2], 'a': [3, 12, 51, 75], 'review': [4], 'of': [5, 41, 70, 77, 100], 'silicon': [6], 'micromachined': [7, 42], 'accelerometers': [8], 'and': [9, 19, 29, 57, 102, 111], 'gyroscopes.': [10], 'Following': [11], 'brief': [13], 'introduction': [14], 'to': [15, 91, 116], 'their': [16, 55], 'operating': [17], 'principles': [18], 'specifications,': [20], 'various': [21], 'device': [22, 26], 'structures,': [23], 'fabrication,': [24, 109], 'technologies,': [25], 'designs,': [27], 'packaging,': [28], 'interface': [30], 'electronics': [31], 'issues,': [32], 'along': [33], 'with': [34], 'the': [35, 39, 64, 68, 84, 118], 'present': [36], 'status': [37], 'in': [38, 54, 63], 'commercialization': [40], 'inertial': [43, 123], 'sensors,': [44], 'are': [45, 114], 'discussed.': [46], 'Inertial': [47], 'sensors': [48], 'have': [49], 'seen': [50], 'steady': [52], 'improvement': [53], 'performance,': [56, 93], 'today,': [58], 'microaccelerometers': [59], 'can': [60], 'resolve': [61], 'accelerations': [62], 'micro-g': [65], 'range,': [66], 'while': [67], 'performance': [69], 'gyroscopes': [71], 'has': [72], 'improved': [73], 'by': [74], 'factor': [76], '10/spl': [78], 'times/': [79], 'every': [80], 'two': [81], 'years': [82], 'during': [83], 'past': [85], 'eight': [86], 'years.': [87], 'impressive': [89], 'drive': [90], 'higher': [92, 98, 103], 'lower': [94], 'cost,': [95], 'greater': [96], 'functionality,': [97], 'levels': [99], 'integration,': [101], 'volume': [104], 'will': [105], 'continue': [106], 'as': [107], 'new': [108], 'circuit,': [110], 'packaging': [112], 'techniques': [113], 'developed': [115], 'meet': [117], 'ever': [119], 'increasing': [120], 'demand': [121], 'for': [122], 'sensors.': [124]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2149128480', 'counts_by_year': [{'year': 2024, 'cited_by_count': 20}, {'year': 2023, 'cited_by_count': 41}, {'year': 2022, 'cited_by_count': 52}, {'year': 2021, 'cited_by_count': 50}, {'year': 2020, 'cited_by_count': 65}, {'year': 2019, 'cited_by_count': 77}, {'year': 2018, 'cited_by_count': 74}, {'year': 2017, 'cited_by_count': 89}, {'year': 2016, 'cited_by_count': 79}, {'year': 2015, 'cited_by_count': 95}, {'year': 2014, 'cited_by_count': 103}, {'year': 2013, 'cited_by_count': 93}, {'year': 2012, 'cited_by_count': 85}], 'updated_date': '2024-09-15T22:41:05.263469', 'created_date': '2016-06-24'}