Title: Low pressure chemical vapor deposition synthesis of hexagonal boron nitride on polycrystalline metal foils
Abstract: The two-dimensional sp2-bonded material hexagonal boron nitride (h-BN) has unique electronic, thermal, mechanical, and chemical properties. It has recently found use as an ideal substrate for graphene-based electronic devices. We here describe synthesis of mono- to few-layer h-BN films using low pressure chemical vapor deposition (LPCVD) from borazine, with nickel, copper and platinum employed as catalytic substrates, and transfer of some of these films using a non-polymer method. Characterization of the films via Raman spectroscopy and transmission electron microscopy (TEM) is performed. Chemical vapor deposition synthesis of hexagonal boron nitride from borazine using metallic substrates.
Publication Year: 2013
Publication Date: 2013-10-04
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 24
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot