Get quick answers to your questions about the article from our AI researcher chatbot
{'id': 'https://openalex.org/W2136088894', 'doi': 'https://doi.org/10.1109/tnano.2010.2042724', 'title': 'Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring, and Clogging Corrections', 'display_name': 'Reliable and Improved Nanoscale Stencil Lithography by Membrane Stabilization, Blurring, and Clogging Corrections', 'publication_year': 2010, 'publication_date': '2010-02-17', 'ids': {'openalex': 'https://openalex.org/W2136088894', 'doi': 'https://doi.org/10.1109/tnano.2010.2042724', 'mag': '2136088894'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/tnano.2010.2042724', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S142331907', 'display_name': 'IEEE Transactions on Nanotechnology', 'issn_l': '1536-125X', 'issn': ['1536-125X', '1941-0085'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319808', 'host_organization_name': 'Institute of Electrical and Electronics Engineers', 'host_organization_lineage': ['https://openalex.org/P4310319808'], 'host_organization_lineage_names': ['Institute of Electrical and Electronics Engineers'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5075300811', 'display_name': 'Oscar Vázquez-Mena', 'orcid': 'https://orcid.org/0000-0001-9054-5183'}, 'institutions': [{'id': 'https://openalex.org/I29607241', 'display_name': 'École Normale Supérieure - PSL', 'ror': 'https://ror.org/05a0dhs15', 'country_code': 'FR', 'type': 'other', 'lineage': ['https://openalex.org/I2746051580', 'https://openalex.org/I29607241']}, {'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}], 'countries': ['CH', 'FR'], 'is_corresponding': False, 'raw_author_name': 'Oscar Vazquez-Mena', 'raw_affiliation_strings': ['Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#'], 'affiliations': [{'raw_affiliation_string': 'Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#', 'institution_ids': ['https://openalex.org/I29607241', 'https://openalex.org/I5124864']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5036095255', 'display_name': 'Katrin Sidler', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I29607241', 'display_name': 'École Normale Supérieure - PSL', 'ror': 'https://ror.org/05a0dhs15', 'country_code': 'FR', 'type': 'other', 'lineage': ['https://openalex.org/I2746051580', 'https://openalex.org/I29607241']}, {'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}], 'countries': ['CH', 'FR'], 'is_corresponding': False, 'raw_author_name': 'Katrin Sidler', 'raw_affiliation_strings': ['Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#'], 'affiliations': [{'raw_affiliation_string': 'Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#', 'institution_ids': ['https://openalex.org/I29607241', 'https://openalex.org/I5124864']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5064887643', 'display_name': 'Veronica Savu', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}, {'id': 'https://openalex.org/I29607241', 'display_name': 'École Normale Supérieure - PSL', 'ror': 'https://ror.org/05a0dhs15', 'country_code': 'FR', 'type': 'other', 'lineage': ['https://openalex.org/I2746051580', 'https://openalex.org/I29607241']}], 'countries': ['CH', 'FR'], 'is_corresponding': False, 'raw_author_name': 'Veronica Savu', 'raw_affiliation_strings': ['Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#'], 'affiliations': [{'raw_affiliation_string': 'Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#', 'institution_ids': ['https://openalex.org/I5124864', 'https://openalex.org/I29607241']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5101628250', 'display_name': 'Chan Woo Park', 'orcid': 'https://orcid.org/0000-0002-8666-016X'}, 'institutions': [{'id': 'https://openalex.org/I142401562', 'display_name': 'Electronics and Telecommunications Research Institute', 'ror': 'https://ror.org/03ysstz10', 'country_code': 'KR', 'type': 'facility', 'lineage': ['https://openalex.org/I142401562']}], 'countries': ['KR'], 'is_corresponding': False, 'raw_author_name': 'Chan Woo Park', 'raw_affiliation_strings': ['IT Convergence Technol. Res. Lab., Electron. & Telecommun. Res. Inst. (ETRI), Daejeon, South Korea'], 'affiliations': [{'raw_affiliation_string': 'IT Convergence Technol. Res. Lab., Electron. & Telecommun. Res. Inst. (ETRI), Daejeon, South Korea', 'institution_ids': ['https://openalex.org/I142401562']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5025457422', 'display_name': 'Luis Guillermo Villanueva', 'orcid': 'https://orcid.org/0000-0003-3340-2930'}, 'institutions': [{'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}, {'id': 'https://openalex.org/I29607241', 'display_name': 'École Normale Supérieure - PSL', 'ror': 'https://ror.org/05a0dhs15', 'country_code': 'FR', 'type': 'other', 'lineage': ['https://openalex.org/I2746051580', 'https://openalex.org/I29607241']}], 'countries': ['CH', 'FR'], 'is_corresponding': False, 'raw_author_name': 'Luis Guillermo Villanueva', 'raw_affiliation_strings': ['Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#'], 'affiliations': [{'raw_affiliation_string': 'Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#', 'institution_ids': ['https://openalex.org/I5124864', 'https://openalex.org/I29607241']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5107195137', 'display_name': 'Juergen Brügger', 'orcid': 'https://orcid.org/0000-0002-7710-5930'}, 'institutions': [{'id': 'https://openalex.org/I29607241', 'display_name': 'École Normale Supérieure - PSL', 'ror': 'https://ror.org/05a0dhs15', 'country_code': 'FR', 'type': 'other', 'lineage': ['https://openalex.org/I2746051580', 'https://openalex.org/I29607241']}, {'id': 'https://openalex.org/I5124864', 'display_name': 'École Polytechnique Fédérale de Lausanne', 'ror': 'https://ror.org/02s376052', 'country_code': 'CH', 'type': 'education', 'lineage': ['https://openalex.org/I2799323385', 'https://openalex.org/I5124864']}], 'countries': ['CH', 'FR'], 'is_corresponding': False, 'raw_author_name': 'Juergen Brugger', 'raw_affiliation_strings': ['Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#'], 'affiliations': [{'raw_affiliation_string': 'Microsyst. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland#TAB#', 'institution_ids': ['https://openalex.org/I29607241', 'https://openalex.org/I5124864']}]}], 'institution_assertions': [], 'countries_distinct_count': 3, 'institutions_distinct_count': 3, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 3.304, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 28, 'citation_normalized_percentile': {'value': 0.853792, 'is_in_top_1_percent': False, 'is_in_top_10_percent': False}, 'cited_by_percentile_year': {'min': 91, 'max': 92}, 'biblio': {'volume': '10', 'issue': '2', 'first_page': '352', 'last_page': '357'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T12224', 'display_name': 'Nanofabrication and Lithography Techniques', 'score': 0.9998, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T11272', 'display_name': 'Nanowire Synthesis and Applications', 'score': 0.9987, 'subfield': {'id': 'https://openalex.org/subfields/2204', 'display_name': 'Biomedical Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10923', 'display_name': 'Force Microscopy Techniques and Applications', 'score': 0.9981, 'subfield': {'id': 'https://openalex.org/subfields/3107', 'display_name': 'Atomic and Molecular Physics, and Optics'}, 'field': {'id': 'https://openalex.org/fields/31', 'display_name': 'Physics and Astronomy'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/stencil', 'display_name': 'Stencil', 'score': 0.9126099}, {'id': 'https://openalex.org/keywords/clogging', 'display_name': 'Clogging', 'score': 0.5646321}, {'id': 'https://openalex.org/keywords/stencil-lithography', 'display_name': 'Stencil lithography', 'score': 0.55654365}, {'id': 'https://openalex.org/keywords/dry-etching', 'display_name': 'Dry etching', 'score': 0.41219717}], 'concepts': [{'id': 'https://openalex.org/C76752949', 'wikidata': 'https://www.wikidata.org/wiki/Q7607499', 'display_name': 'Stencil', 'level': 2, 'score': 0.9126099}, {'id': 'https://openalex.org/C41625074', 'wikidata': 'https://www.wikidata.org/wiki/Q176088', 'display_name': 'Membrane', 'level': 2, 'score': 0.7464754}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.7252218}, {'id': 'https://openalex.org/C136525101', 'wikidata': 'https://www.wikidata.org/wiki/Q5428139', 'display_name': 'Fabrication', 'level': 3, 'score': 0.68509334}, {'id': 'https://openalex.org/C100460472', 'wikidata': 'https://www.wikidata.org/wiki/Q2368605', 'display_name': 'Etching (microfabrication)', 'level': 3, 'score': 0.66969675}, {'id': 'https://openalex.org/C204223013', 'wikidata': 'https://www.wikidata.org/wiki/Q133036', 'display_name': 'Lithography', 'level': 2, 'score': 0.64865416}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.60574436}, {'id': 'https://openalex.org/C2778152828', 'wikidata': 'https://www.wikidata.org/wiki/Q488656', 'display_name': 'Clogging', 'level': 2, 'score': 0.5646321}, {'id': 'https://openalex.org/C45206210', 'wikidata': 'https://www.wikidata.org/wiki/Q2415817', 'display_name': 'Nanoscopic scale', 'level': 2, 'score': 0.56044203}, {'id': 'https://openalex.org/C70520399', 'wikidata': 'https://www.wikidata.org/wiki/Q7607503', 'display_name': 'Stencil lithography', 'level': 5, 'score': 0.55654365}, {'id': 'https://openalex.org/C1291036', 'wikidata': 'https://www.wikidata.org/wiki/Q1191918', 'display_name': 'Dry etching', 'level': 4, 'score': 0.41219717}, {'id': 'https://openalex.org/C49040817', 'wikidata': 'https://www.wikidata.org/wiki/Q193091', 'display_name': 'Optoelectronics', 'level': 1, 'score': 0.39979905}, {'id': 'https://openalex.org/C53524968', 'wikidata': 'https://www.wikidata.org/wiki/Q7315582', 'display_name': 'Resist', 'level': 3, 'score': 0.23952493}, {'id': 'https://openalex.org/C200274948', 'wikidata': 'https://www.wikidata.org/wiki/Q256845', 'display_name': 'Electron-beam lithography', 'level': 4, 'score': 0.20721552}, {'id': 'https://openalex.org/C41008148', 'wikidata': 'https://www.wikidata.org/wiki/Q21198', 'display_name': 'Computer science', 'level': 0, 'score': 0.19752967}, {'id': 'https://openalex.org/C2779227376', 'wikidata': 'https://www.wikidata.org/wiki/Q6505497', 'display_name': 'Layer (electronics)', 'level': 2, 'score': 0.18007949}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.09523925}, {'id': 'https://openalex.org/C55493867', 'wikidata': 'https://www.wikidata.org/wiki/Q7094', 'display_name': 'Biochemistry', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C459310', 'wikidata': 'https://www.wikidata.org/wiki/Q117801', 'display_name': 'Computational science', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C166957645', 'wikidata': 'https://www.wikidata.org/wiki/Q23498', 'display_name': 'Archaeology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C95457728', 'wikidata': 'https://www.wikidata.org/wiki/Q309', 'display_name': 'History', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C71924100', 'wikidata': 'https://www.wikidata.org/wiki/Q11190', 'display_name': 'Medicine', 'level': 0, 'score': 0.0}, {'id': 'https://openalex.org/C204787440', 'wikidata': 'https://www.wikidata.org/wiki/Q188504', 'display_name': 'Alternative medicine', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C142724271', 'wikidata': 'https://www.wikidata.org/wiki/Q7208', 'display_name': 'Pathology', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/tnano.2010.2042724', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S142331907', 'display_name': 'IEEE Transactions on Nanotechnology', 'issn_l': '1536-125X', 'issn': ['1536-125X', '1941-0085'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319808', 'host_organization_name': 'Institute of Electrical and Electronics Engineers', 'host_organization_lineage': ['https://openalex.org/P4310319808'], 'host_organization_lineage_names': ['Institute of Electrical and Electronics Engineers'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 20, 'referenced_works': ['https://openalex.org/W1964107152', 'https://openalex.org/W1971323440', 'https://openalex.org/W1973383957', 'https://openalex.org/W1986625599', 'https://openalex.org/W1993609247', 'https://openalex.org/W2012941864', 'https://openalex.org/W2036113370', 'https://openalex.org/W2039618303', 'https://openalex.org/W2049670437', 'https://openalex.org/W2050132318', 'https://openalex.org/W2070647821', 'https://openalex.org/W2079271175', 'https://openalex.org/W2080396571', 'https://openalex.org/W2110070104', 'https://openalex.org/W2121849860', 'https://openalex.org/W2143735096', 'https://openalex.org/W2153563966', 'https://openalex.org/W2154281786', 'https://openalex.org/W2171366069', 'https://openalex.org/W2206385443'], 'related_works': ['https://openalex.org/W4389610727', 'https://openalex.org/W2606331679', 'https://openalex.org/W2117008669', 'https://openalex.org/W2104619445', 'https://openalex.org/W2082899826', 'https://openalex.org/W2055070438', 'https://openalex.org/W2048774326', 'https://openalex.org/W1975974156', 'https://openalex.org/W1584805413', 'https://openalex.org/W1492209788'], 'abstract_inverted_index': {'The': [0], 'reliable': [1], 'and': [2, 30, 48, 63], 'reproducible': [3], 'fabrication': [4], 'of': [5, 17, 26, 33, 55, 66, 75, 97], 'nanostructures': [6, 56], 'by': [7, 57], 'stencil': [8, 20, 38, 81], 'lithography': [9], '(SL)': [10], 'faces': [11], 'three': [12, 45], 'main': [13], 'challenges:': [14], 'the': [15, 18, 24, 27, 31, 34, 37, 53, 61, 64, 67, 80, 85, 95, 118, 122, 128], 'stability': [16, 65], 'thin': [19], 'membranes': [21, 123], 'with': [22], 'nanoapertures,': [23], 'blurring': [25], 'deposited': [28], 'structures,': [29], 'clogging': [32], 'nanoapertures': [35], 'in': [36], 'membranes.': [39, 82], 'This': [40], 'study': [41], 'reports': [42], 'on': [43, 121], 'these': [44], 'important': [46], 'issues': [47], 'presents': [49], 'corresponding': [50], 'solutions': [51], 'for': [52], 'patterning': [54], 'SL.': [58], 'To': [59, 83], 'increase': [60], 'stiffness': [62], 'membranes,': [68], 'we': [69, 87, 104, 110], 'have': [70, 88, 105, 111], 'used': [71, 89, 112], 'a': [72, 90, 125], 'hexagonal': [73], 'array': [74], 'corrugations': [76], 'to': [77, 116, 127], 'globally': [78], 'reinforce': [79], 'correct': [84], 'blurring,': [86], 'corrective': [91, 102], 'etching': [92, 115], 'that': [93], 'improves': [94], 'definition': [96], 'Al': [98], 'nanostructures.': [99], 'Using': [100], 'this': [101], 'etching,': [103], 'fabricated': [106], 'poly-Si': [107], 'nanowires.': [108], 'Finally,': [109], 'metal': [113], 'wet': [114], 'remove': [117], 'material': [119], 'accumulated': [120], 'as': [124], 'remedy': [126], 'clogging.': [129]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2136088894', 'counts_by_year': [{'year': 2024, 'cited_by_count': 1}, {'year': 2022, 'cited_by_count': 1}, {'year': 2021, 'cited_by_count': 2}, {'year': 2020, 'cited_by_count': 1}, {'year': 2017, 'cited_by_count': 2}, {'year': 2016, 'cited_by_count': 1}, {'year': 2015, 'cited_by_count': 2}, {'year': 2014, 'cited_by_count': 1}, {'year': 2013, 'cited_by_count': 5}, {'year': 2012, 'cited_by_count': 6}], 'updated_date': '2025-01-03T12:48:30.510091', 'created_date': '2016-06-24'}