Abstract: Fourier transform white-light interferometry recovers the optical path difference of an interferometer by measuring the phase change caused by scanning wavelength. However, the optical spectrum, obtained by wavelength scanning method (λ-method), contains a chirp in period. The chirp would induce deviation and decrease the measurement accuracy. An improved method, the wavenumber scanning method (k-method), is proposed and experimentally demonstrated, in which there is no chirp in the optical spectrum. The measurement results using the k-method and the λ-method are compared experimentally. The experimental results show that the standard deviation of the measurement results decreases from 0.015 to 0.004 μm, when an extrinsic Fabry-Perot interferometer with a cavity length of 387 μm is interrogated.
Publication Year: 2012
Publication Date: 2012-07-30
Language: en
Type: article
Indexed In: ['crossref', 'pubmed']
Access and Citation
Cited By Count: 19
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