Plasma Process. Polym. 2/2011

Name: Work Video:
Duration: 3 min 30 s
Description: Cover: Silicon oxide powder particle formation in HMDSO/O2 plasmas has been studied using the in-situ FTIR spectroscopy. The development from molecule to powder in the plasma has been investigated in view of plasma chemistry. Further details can be found in the article by M. Ricci,* J. L. Dorier, Ch. Hollenstein and P. Fayet on page 108.
Marina Ricci; J.-L. Dorier; Christoph Hollenstein; P. Fayet
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