Publication Information

{'id': 'https://openalex.org/W2125015261', 'doi': 'https://doi.org/10.1109/27.370251', 'title': 'Excitation, ionization, and reaction mechanism of a reactive cathodic arc deposition of TiN', 'display_name': 'Excitation, ionization, and reaction mechanism of a reactive cathodic arc deposition of TiN', 'publication_year': 1994, 'publication_date': '1994-01-01', 'ids': {'openalex': 'https://openalex.org/W2125015261', 'doi': 'https://doi.org/10.1109/27.370251', 'mag': '2125015261'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/27.370251', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S164692974', 'display_name': 'IEEE Transactions on Plasma Science', 'issn_l': '0093-3813', 'issn': ['0093-3813', '1939-9375'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319808', 'host_organization_name': 'Institute of Electrical and Electronics Engineers', 'host_organization_lineage': ['https://openalex.org/P4310319808'], 'host_organization_lineage_names': ['Institute of Electrical and Electronics Engineers'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5025011179', 'display_name': 'Mamoru Sakaki', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I136259955', 'display_name': 'Toyohashi University of Technology', 'ror': 'https://ror.org/04ezg6d83', 'country_code': 'JP', 'type': 'education', 'lineage': ['https://openalex.org/I136259955']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'M. Sakaki', 'raw_affiliation_strings': ['Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Tech., Japan'], 'affiliations': [{'raw_affiliation_string': 'Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Tech., Japan', 'institution_ids': ['https://openalex.org/I136259955']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5109277144', 'display_name': 'T. Sakakibara', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I136259955', 'display_name': 'Toyohashi University of Technology', 'ror': 'https://ror.org/04ezg6d83', 'country_code': 'JP', 'type': 'education', 'lineage': ['https://openalex.org/I136259955']}], 'countries': ['JP'], 'is_corresponding': False, 'raw_author_name': 'T. Sakakibara', 'raw_affiliation_strings': ['Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Tech., Japan'], 'affiliations': [{'raw_affiliation_string': 'Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Tech., Japan', 'institution_ids': ['https://openalex.org/I136259955']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': None, 'apc_paid': None, 'fwci': 1.97, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 52, 'citation_normalized_percentile': {'value': 0.915986, 'is_in_top_1_percent': False, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 92, 'max': 93}, 'biblio': {'volume': '22', 'issue': '6', 'first_page': '1049', 'last_page': '1054'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10377', 'display_name': 'Metal and Thin Film Mechanics', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2211', 'display_name': 'Mechanics of Materials'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10377', 'display_name': 'Metal and Thin Film Mechanics', 'score': 0.9999, 'subfield': {'id': 'https://openalex.org/subfields/2211', 'display_name': 'Mechanics of Materials'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T12077', 'display_name': 'Vacuum and Plasma Arcs', 'score': 0.9987, 'subfield': {'id': 'https://openalex.org/subfields/3107', 'display_name': 'Atomic and Molecular Physics, and Optics'}, 'field': {'id': 'https://openalex.org/fields/31', 'display_name': 'Physics and Astronomy'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10478', 'display_name': 'Diamond and Carbon-based Materials Research', 'score': 0.9985, 'subfield': {'id': 'https://openalex.org/subfields/2505', 'display_name': 'Materials Chemistry'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/electron-excitation', 'display_name': 'Electron excitation', 'score': 0.51969916}], 'concepts': [{'id': 'https://openalex.org/C525849907', 'wikidata': 'https://www.wikidata.org/wiki/Q1096', 'display_name': 'Tin', 'level': 2, 'score': 0.69785464}, {'id': 'https://openalex.org/C198291218', 'wikidata': 'https://www.wikidata.org/wiki/Q190382', 'display_name': 'Ionization', 'level': 3, 'score': 0.6358376}, {'id': 'https://openalex.org/C184779094', 'wikidata': 'https://www.wikidata.org/wiki/Q26383', 'display_name': 'Atomic physics', 'level': 1, 'score': 0.6329876}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.60252076}, {'id': 'https://openalex.org/C181500209', 'wikidata': 'https://www.wikidata.org/wiki/Q215328', 'display_name': 'Excited state', 'level': 2, 'score': 0.57439315}, {'id': 'https://openalex.org/C145148216', 'wikidata': 'https://www.wikidata.org/wiki/Q36496', 'display_name': 'Ion', 'level': 2, 'score': 0.5668554}, {'id': 'https://openalex.org/C113196181', 'wikidata': 'https://www.wikidata.org/wiki/Q485223', 'display_name': 'Analytical Chemistry (journal)', 'level': 2, 'score': 0.5249388}, {'id': 'https://openalex.org/C2778005398', 'wikidata': 'https://www.wikidata.org/wiki/Q5358172', 'display_name': 'Electron excitation', 'level': 3, 'score': 0.51969916}, {'id': 'https://openalex.org/C205759337', 'wikidata': 'https://www.wikidata.org/wiki/Q1748259', 'display_name': 'Electron ionization', 'level': 4, 'score': 0.5178926}, {'id': 'https://openalex.org/C175708663', 'wikidata': 'https://www.wikidata.org/wiki/Q899559', 'display_name': 'X-ray photoelectron spectroscopy', 'level': 2, 'score': 0.49730542}, {'id': 'https://openalex.org/C49110097', 'wikidata': 'https://www.wikidata.org/wiki/Q175233', 'display_name': 'Cathode', 'level': 2, 'score': 0.48752305}, {'id': 'https://openalex.org/C2777289219', 'wikidata': 'https://www.wikidata.org/wiki/Q7632154', 'display_name': 'Substrate (aquarium)', 'level': 2, 'score': 0.42800996}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.20138007}, {'id': 'https://openalex.org/C147789679', 'wikidata': 'https://www.wikidata.org/wiki/Q11372', 'display_name': 'Physical chemistry', 'level': 1, 'score': 0.11289847}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.091001004}, {'id': 'https://openalex.org/C46141821', 'wikidata': 'https://www.wikidata.org/wiki/Q209402', 'display_name': 'Nuclear magnetic resonance', 'level': 1, 'score': 0.09073508}, {'id': 'https://openalex.org/C191897082', 'wikidata': 'https://www.wikidata.org/wiki/Q11467', 'display_name': 'Metallurgy', 'level': 1, 'score': 0.060581982}, {'id': 'https://openalex.org/C111368507', 'wikidata': 'https://www.wikidata.org/wiki/Q43518', 'display_name': 'Oceanography', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C178790620', 'wikidata': 'https://www.wikidata.org/wiki/Q11351', 'display_name': 'Organic chemistry', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C43617362', 'wikidata': 'https://www.wikidata.org/wiki/Q170050', 'display_name': 'Chromatography', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C127313418', 'wikidata': 'https://www.wikidata.org/wiki/Q1069', 'display_name': 'Geology', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1109/27.370251', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S164692974', 'display_name': 'IEEE Transactions on Plasma Science', 'issn_l': '0093-3813', 'issn': ['0093-3813', '1939-9375'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310319808', 'host_organization_name': 'Institute of Electrical and Electronics Engineers', 'host_organization_lineage': ['https://openalex.org/P4310319808'], 'host_organization_lineage_names': ['Institute of Electrical and Electronics Engineers'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [{'score': 0.9, 'display_name': 'Affordable and clean energy', 'id': 'https://metadata.un.org/sdg/7'}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 22, 'referenced_works': ['https://openalex.org/W1980375385', 'https://openalex.org/W1981627779', 'https://openalex.org/W2009136561', 'https://openalex.org/W2012372157', 'https://openalex.org/W2032861393', 'https://openalex.org/W2036721913', 'https://openalex.org/W2064043005', 'https://openalex.org/W2068347249', 'https://openalex.org/W2070099165', 'https://openalex.org/W2110400631', 'https://openalex.org/W2119786251', 'https://openalex.org/W2131291580', 'https://openalex.org/W2140015846', 'https://openalex.org/W2162629261', 'https://openalex.org/W242691931', 'https://openalex.org/W2512864875', 'https://openalex.org/W2516518501', 'https://openalex.org/W2607408526', 'https://openalex.org/W2991388494', 'https://openalex.org/W3004078317', 'https://openalex.org/W3216785217', 'https://openalex.org/W4236641648'], 'related_works': ['https://openalex.org/W4234793890', 'https://openalex.org/W2313881412', 'https://openalex.org/W2092591677', 'https://openalex.org/W2085971427', 'https://openalex.org/W2024072423', 'https://openalex.org/W2021680515', 'https://openalex.org/W2010221731', 'https://openalex.org/W1997384025', 'https://openalex.org/W1969877046', 'https://openalex.org/W1561770811'], 'abstract_inverted_index': {'This': [0], 'paper': [1], 'discusses': [2], 'the': [3, 22, 46, 51, 71, 75, 81, 99, 114, 122, 128, 132, 135, 142, 145, 162, 167], 'excitation,': [4], 'ionization': [5], 'and': [6, 50, 105, 110, 113], 'reaction': [7], 'mechanism': [8], 'of': [9, 14, 38, 59, 159], 'reactive': [10], 'cathodic': [11], 'arc': [12, 17, 23, 31, 44], 'deposition': [13], 'TiN.': [15], 'Such': [16], 'plasmas': [18], 'art': [19], 'operated': [20, 33], 'in': [21, 34, 131], 'discharge': [24], 'type': [25], 'PVD': [26], 'apparatus.': [27], 'The': [28, 43, 61], '50': [29], 'A': [30], 'is': [32, 125], 'N/sub': [35, 76, 137, 146], '2/': [36, 77, 138, 147], 'atmosphere': [37], '0.13': [39], 'to': [40, 85, 150, 170], '26.6': [41], 'Pa.': [42], 'voltage,': [45], 'electron': [47, 84], 'energy': [48, 83], 'distribution': [49], 'spectral': [52], 'intensities': [53], 'are': [54, 64, 95, 139, 148], 'measured': [55], 'as': [56], 'a': [57], 'function': [58], 'pressure.': [60], 'deposited': [62], 'films': [63], 'analyzed': [65], 'by': [66], 'XPS.': [67], 'It': [68], 'follows': [69], 'from': [70, 98], 'result': [72], 'that': [73], '(1)': [74], 'molecules': [78], 'impact': [79], 'with': [80, 103, 118, 155, 166], 'high': [82], 'be': [86], 'excited': [87, 136], 'or': [88], 'ionized;': [89], '(2)': [90], 'Ti/sup': [91, 107, 156], '++/': [92], 'ions': [93, 109, 158], 'which': [94], 'initially': [96], 'emitted': [97], 'cathode': [100], 'spot': [101], 'recombine': [102], 'electrons': [104], 'turn': [106], '+/': [108, 157], 'Ti': [111, 168], 'atoms': [112, 152, 164, 169], 'recombination': [115], 'ratio': [116], 'increases': [117], 'increasing': [119], 'pressure;': [120], '(3)': [121], 'TiN': [123], 'compound': [124], 'produced': [126], 'on': [127, 141], 'substrate': [129, 143], 'surface': [130], 'ensuing': [133], 'process,': [134], 'adsorbed': [140], 'surface,': [144], 'dissociated': [149], 'N': [151, 163], 'through': [153], 'collisions': [154], '40-60': [160], 'eV,': [161], 'react': [165], 'form': [171], 'TiN.<': [172], '<ETX': [173], 'xmlns:mml="http://www.w3.org/1998/Math/MathML"': [174], 'xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>': [175]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2125015261', 'counts_by_year': [{'year': 2023, 'cited_by_count': 1}, {'year': 2018, 'cited_by_count': 1}, {'year': 2015, 'cited_by_count': 2}, {'year': 2014, 'cited_by_count': 3}, {'year': 2013, 'cited_by_count': 2}], 'updated_date': '2024-12-13T03:13:03.019513', 'created_date': '2016-06-24'}