Title: Ferroelectric thin films of PbTiO<sub>3</sub>system prepared by sputtering deposition and their application to pyroelectric sensors
Abstract:Abstract Highly c-axis oriented PbTiO3,Pb1−x/4O3(PLT), and tetragonal PbZrxTi1−xO3(PZT) thin films were successfully grown with good epitaxy on (100)-cleaved MgO single crystal and [100]-oriented Pt t...Abstract Highly c-axis oriented PbTiO3,Pb1−x/4O3(PLT), and tetragonal PbZrxTi1−xO3(PZT) thin films were successfully grown with good epitaxy on (100)-cleaved MgO single crystal and [100]-oriented Pt thin films by rf-magnetron sputtering method. It was found that the thin films have large pyroelectric currents and high figures of merit for infrared (IR) sensors without a poling treatment. High sensitive pyroelectric infrared sensors (point and linear array type) were fabricated by using PLT thin films with x = 0.1 (PL10) which are the most suitable for pyroelectric material. The linear array sensors with reticulated PL10 have a remarkably high specific detectivity D* of 5 × 108 cm Hz1/2/W and a very low thermal cross talk of 3% at 100 Hz.Read More
Publication Year: 1989
Publication Date: 1989-07-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 8
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