Get quick answers to your questions about the article from our AI researcher chatbot
{'id': 'https://openalex.org/W2121285255', 'doi': 'https://doi.org/10.1080/10408430601187624', 'title': 'Formation, Dynamics, and Characterization of Nanostructures by Ion Beam Irradiation', 'display_name': 'Formation, Dynamics, and Characterization of Nanostructures by Ion Beam Irradiation', 'publication_year': 2007, 'publication_date': '2007-05-17', 'ids': {'openalex': 'https://openalex.org/W2121285255', 'doi': 'https://doi.org/10.1080/10408430601187624', 'mag': '2121285255'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1080/10408430601187624', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S72003023', 'display_name': 'Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences', 'issn_l': '0161-1593', 'issn': ['0161-1593', '1040-8436', '1547-6561'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320547', 'host_organization_name': 'Taylor & Francis', 'host_organization_lineage': ['https://openalex.org/P4310320547'], 'host_organization_lineage_names': ['Taylor & Francis'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5023844687', 'display_name': 'Sandip Dhara', 'orcid': 'https://orcid.org/0000-0001-9728-9952'}, 'institutions': [{'id': 'https://openalex.org/I2802630050', 'display_name': 'Indira Gandhi Centre for Atomic Research', 'ror': 'https://ror.org/05tkzma19', 'country_code': 'IN', 'type': 'facility', 'lineage': ['https://openalex.org/I2799351866', 'https://openalex.org/I2802630050', 'https://openalex.org/I3149292468']}], 'countries': ['IN'], 'is_corresponding': True, 'raw_author_name': 'S. Dhara', 'raw_affiliation_strings': ['a Materials Science Division, Indira Gandhi Centre for Atomic Research , Kalpakkam , Tamil Nadu , 603 102 , India'], 'affiliations': [{'raw_affiliation_string': 'a Materials Science Division, Indira Gandhi Centre for Atomic Research , Kalpakkam , Tamil Nadu , 603 102 , India', 'institution_ids': ['https://openalex.org/I2802630050']}]}], 'countries_distinct_count': 1, 'institutions_distinct_count': 1, 'corresponding_author_ids': ['https://openalex.org/A5023844687'], 'corresponding_institution_ids': ['https://openalex.org/I2802630050'], 'apc_list': None, 'apc_paid': None, 'fwci': 4.33, 'has_fulltext': False, 'cited_by_count': 83, 'citation_normalized_percentile': {'value': 0.965342, 'is_in_top_1_percent': False, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 96, 'max': 97}, 'biblio': {'volume': '32', 'issue': '1-2', 'first_page': '1', 'last_page': '50'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T12166', 'display_name': 'Ion Beam Surface Analysis and Nanoscale Patterning', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2206', 'display_name': 'Computational Mechanics'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T12166', 'display_name': 'Ion Beam Surface Analysis and Nanoscale Patterning', 'score': 1.0, 'subfield': {'id': 'https://openalex.org/subfields/2206', 'display_name': 'Computational Mechanics'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T14117', 'display_name': 'Failure Analysis of Integrated Circuits', 'score': 0.9976, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10204', 'display_name': 'Nanomaterials and Mechanical Properties', 'score': 0.9971, 'subfield': {'id': 'https://openalex.org/subfields/2505', 'display_name': 'Materials Chemistry'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/ion-beam-mixing', 'display_name': 'Ion beam mixing', 'score': 0.75323784}, {'id': 'https://openalex.org/keywords/ion-beam', 'display_name': 'Ion Beam', 'score': 0.567909}, {'id': 'https://openalex.org/keywords/deformation-mechanisms', 'display_name': 'Deformation Mechanisms', 'score': 0.521885}, {'id': 'https://openalex.org/keywords/nanostructures', 'display_name': 'Nanostructures', 'score': 0.514253}, {'id': 'https://openalex.org/keywords/nanoscale-patterning', 'display_name': 'Nanoscale Patterning', 'score': 0.506399}], 'concepts': [{'id': 'https://openalex.org/C79176676', 'wikidata': 'https://www.wikidata.org/wiki/Q6063409', 'display_name': 'Ion beam mixing', 'level': 5, 'score': 0.75323784}, {'id': 'https://openalex.org/C50774322', 'wikidata': 'https://www.wikidata.org/wiki/Q644248', 'display_name': 'Ion beam', 'level': 3, 'score': 0.68246895}, {'id': 'https://openalex.org/C111337013', 'wikidata': 'https://www.wikidata.org/wiki/Q2737837', 'display_name': 'Irradiation', 'level': 2, 'score': 0.61748403}, {'id': 'https://openalex.org/C145148216', 'wikidata': 'https://www.wikidata.org/wiki/Q36496', 'display_name': 'Ion', 'level': 2, 'score': 0.5811065}, {'id': 'https://openalex.org/C93106096', 'wikidata': 'https://www.wikidata.org/wiki/Q17125820', 'display_name': 'Ion beam deposition', 'level': 4, 'score': 0.5508582}, {'id': 'https://openalex.org/C192562407', 'wikidata': 'https://www.wikidata.org/wiki/Q228736', 'display_name': 'Materials science', 'level': 0, 'score': 0.5221801}, {'id': 'https://openalex.org/C41823505', 'wikidata': 'https://www.wikidata.org/wiki/Q1436752', 'display_name': 'Ion implantation', 'level': 3, 'score': 0.49189115}, {'id': 'https://openalex.org/C61048295', 'wikidata': 'https://www.wikidata.org/wiki/Q909022', 'display_name': 'Nucleation', 'level': 2, 'score': 0.46497086}, {'id': 'https://openalex.org/C186187911', 'wikidata': 'https://www.wikidata.org/wiki/Q1093894', 'display_name': 'Nanostructure', 'level': 2, 'score': 0.43941328}, {'id': 'https://openalex.org/C184779094', 'wikidata': 'https://www.wikidata.org/wiki/Q26383', 'display_name': 'Atomic physics', 'level': 1, 'score': 0.4298278}, {'id': 'https://openalex.org/C159467904', 'wikidata': 'https://www.wikidata.org/wiki/Q2001702', 'display_name': 'Chemical physics', 'level': 1, 'score': 0.42672354}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.37099975}, {'id': 'https://openalex.org/C171250308', 'wikidata': 'https://www.wikidata.org/wiki/Q11468', 'display_name': 'Nanotechnology', 'level': 1, 'score': 0.31810045}, {'id': 'https://openalex.org/C185544564', 'wikidata': 'https://www.wikidata.org/wiki/Q81197', 'display_name': 'Nuclear physics', 'level': 1, 'score': 0.07908097}, {'id': 'https://openalex.org/C121332964', 'wikidata': 'https://www.wikidata.org/wiki/Q413', 'display_name': 'Physics', 'level': 0, 'score': 0.06933308}, {'id': 'https://openalex.org/C178790620', 'wikidata': 'https://www.wikidata.org/wiki/Q11351', 'display_name': 'Organic chemistry', 'level': 1, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1080/10408430601187624', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S72003023', 'display_name': 'Critical reviews in solid state and materials sciences/CRC critical reviews in solid state and materials sciences', 'issn_l': '0161-1593', 'issn': ['0161-1593', '1040-8436', '1547-6561'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320547', 'host_organization_name': 'Taylor & Francis', 'host_organization_lineage': ['https://openalex.org/P4310320547'], 'host_organization_lineage_names': ['Taylor & Francis'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [{'score': 0.41, 'display_name': 'Affordable and clean energy', 'id': 'https://metadata.un.org/sdg/7'}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 307, 'referenced_works': ['https://openalex.org/W1507046897', 'https://openalex.org/W1509182036', 'https://openalex.org/W1521626435', 'https://openalex.org/W1527122270', 'https://openalex.org/W1536825034', 'https://openalex.org/W1556801875', 'https://openalex.org/W1558659876', 'https://openalex.org/W1589061476', 'https://openalex.org/W1596159494', 'https://openalex.org/W1598285744', 'https://openalex.org/W1615067737', 'https://openalex.org/W1628490536', 'https://openalex.org/W1636585660', 'https://openalex.org/W1638807275', 'https://openalex.org/W1651217875', 'https://openalex.org/W1669531903', 'https://openalex.org/W1674096471', 'https://openalex.org/W1679187070', 'https://openalex.org/W1904722142', 'https://openalex.org/W1964173773', 'https://openalex.org/W1964177772', 'https://openalex.org/W1964434774', 'https://openalex.org/W1964831138', 'https://openalex.org/W1965245884', 'https://openalex.org/W1965637008', 'https://openalex.org/W1967472142', 'https://openalex.org/W1967967789', 'https://openalex.org/W1968037406', 'https://openalex.org/W1968084354', 'https://openalex.org/W1968241153', 'https://openalex.org/W1968319736', 'https://openalex.org/W1969029129', 'https://openalex.org/W1969200114', 'https://openalex.org/W1969678081', 'https://openalex.org/W1970588338', 'https://openalex.org/W1970830493', 'https://openalex.org/W1971225048', 'https://openalex.org/W1971351962', 'https://openalex.org/W1972973273', 'https://openalex.org/W1973202368', 'https://openalex.org/W1973702056', 'https://openalex.org/W1973728187', 'https://openalex.org/W1973977393', 'https://openalex.org/W1974987720', 'https://openalex.org/W1975642142', 'https://openalex.org/W1976947909', 'https://openalex.org/W1978145217', 'https://openalex.org/W1978531181', 'https://openalex.org/W1978663052', 'https://openalex.org/W1978850591', 'https://openalex.org/W1979802098', 'https://openalex.org/W1979827756', 'https://openalex.org/W1980280316', 'https://openalex.org/W1980687522', 'https://openalex.org/W1981013920', 'https://openalex.org/W1981093201', 'https://openalex.org/W1981516962', 'https://openalex.org/W1981744452', 'https://openalex.org/W1982890793', 'https://openalex.org/W1982910440', 'https://openalex.org/W1983004968', 'https://openalex.org/W1983701663', 'https://openalex.org/W1983905918', 'https://openalex.org/W1984854216', 'https://openalex.org/W1985408985', 'https://openalex.org/W1985432369', 'https://openalex.org/W1986103822', 'https://openalex.org/W1986299214', 'https://openalex.org/W1987403983', 'https://openalex.org/W1987928881', 'https://openalex.org/W1988420422', 'https://openalex.org/W1988635151', 'https://openalex.org/W1988924159', 'https://openalex.org/W1989699699', 'https://openalex.org/W1989904603', 'https://openalex.org/W1990345446', 'https://openalex.org/W1990456104', 'https://openalex.org/W1992105243', 'https://openalex.org/W1992542279', 'https://openalex.org/W1992565755', 'https://openalex.org/W1992966636', 'https://openalex.org/W1993293847', 'https://openalex.org/W1993311305', 'https://openalex.org/W1993519691', 'https://openalex.org/W1993725667', 'https://openalex.org/W1993880863', 'https://openalex.org/W1993948058', 'https://openalex.org/W1994140805', 'https://openalex.org/W1994222947', 'https://openalex.org/W1994527871', 'https://openalex.org/W1994561956', 'https://openalex.org/W1994569291', 'https://openalex.org/W1997056750', 'https://openalex.org/W1997469967', 'https://openalex.org/W1998209190', 'https://openalex.org/W1999123349', 'https://openalex.org/W1999346634', 'https://openalex.org/W1999934302', 'https://openalex.org/W2000419782', 'https://openalex.org/W2000595947', 'https://openalex.org/W2001353539', 'https://openalex.org/W2001649701', 'https://openalex.org/W2002079817', 'https://openalex.org/W2002109421', 'https://openalex.org/W2002168478', 'https://openalex.org/W2003985568', 'https://openalex.org/W2004785847', 'https://openalex.org/W2004829888', 'https://openalex.org/W2004880698', 'https://openalex.org/W2005776690', 'https://openalex.org/W2006187008', 'https://openalex.org/W2007097657', 'https://openalex.org/W2007396380', 'https://openalex.org/W2007877956', 'https://openalex.org/W2009246791', 'https://openalex.org/W2009256605', 'https://openalex.org/W2009873089', 'https://openalex.org/W2010577719', 'https://openalex.org/W2011511062', 'https://openalex.org/W2011530078', 'https://openalex.org/W2011703367', 'https://openalex.org/W2012636347', 'https://openalex.org/W2012728997', 'https://openalex.org/W2013713525', 'https://openalex.org/W2013750571', 'https://openalex.org/W2013945464', 'https://openalex.org/W2014794885', 'https://openalex.org/W2015318266', 'https://openalex.org/W2015466740', 'https://openalex.org/W2017237989', 'https://openalex.org/W2017656280', 'https://openalex.org/W2018421718', 'https://openalex.org/W2019081911', 'https://openalex.org/W2019988604', 'https://openalex.org/W2020979954', 'https://openalex.org/W2021254678', 'https://openalex.org/W2021335763', 'https://openalex.org/W2021873548', 'https://openalex.org/W2023189194', 'https://openalex.org/W2024169829', 'https://openalex.org/W2024630170', 'https://openalex.org/W2025463151', 'https://openalex.org/W2025688268', 'https://openalex.org/W2026224585', 'https://openalex.org/W2027370256', 'https://openalex.org/W2027973141', 'https://openalex.org/W2029170106', 'https://openalex.org/W2029241993', 'https://openalex.org/W2029470223', 'https://openalex.org/W2030253628', 'https://openalex.org/W2030957096', 'https://openalex.org/W2031117775', 'https://openalex.org/W2031149202', 'https://openalex.org/W2031498913', 'https://openalex.org/W2031583489', 'https://openalex.org/W2031615832', 'https://openalex.org/W2032236354', 'https://openalex.org/W2032477863', 'https://openalex.org/W2033285297', 'https://openalex.org/W2033536298', 'https://openalex.org/W2034116835', 'https://openalex.org/W2034348834', 'https://openalex.org/W2034369364', 'https://openalex.org/W2034823969', 'https://openalex.org/W2035137611', 'https://openalex.org/W2035819892', 'https://openalex.org/W2036610119', 'https://openalex.org/W2036663960', 'https://openalex.org/W2036915081', 'https://openalex.org/W2037065281', 'https://openalex.org/W2037396418', 'https://openalex.org/W2037885171', 'https://openalex.org/W2038407788', 'https://openalex.org/W2039014809', 'https://openalex.org/W2039221665', 'https://openalex.org/W2039470843', 'https://openalex.org/W2039560903', 'https://openalex.org/W2039586748', 'https://openalex.org/W2039818762', 'https://openalex.org/W2039975045', 'https://openalex.org/W2040071241', 'https://openalex.org/W2040318098', 'https://openalex.org/W2040615169', 'https://openalex.org/W2041455947', 'https://openalex.org/W2042380595', 'https://openalex.org/W2042602582', 'https://openalex.org/W2042947148', 'https://openalex.org/W2043177978', 'https://openalex.org/W2044377484', 'https://openalex.org/W2044482262', 'https://openalex.org/W2044514153', 'https://openalex.org/W2045476506', 'https://openalex.org/W2046050582', 'https://openalex.org/W2047559570', 'https://openalex.org/W2047932727', 'https://openalex.org/W2048033025', 'https://openalex.org/W2048367698', 'https://openalex.org/W2048707469', 'https://openalex.org/W2049407734', 'https://openalex.org/W2050220375', 'https://openalex.org/W2051014657', 'https://openalex.org/W2051406454', 'https://openalex.org/W2051551378', 'https://openalex.org/W2052874131', 'https://openalex.org/W2053142819', 'https://openalex.org/W2053592142', 'https://openalex.org/W2053692730', 'https://openalex.org/W2054037985', 'https://openalex.org/W2055755082', 'https://openalex.org/W2055881008', 'https://openalex.org/W2055909947', 'https://openalex.org/W2057150095', 'https://openalex.org/W2057424152', 'https://openalex.org/W2057588732', 'https://openalex.org/W2057826789', 'https://openalex.org/W2059461154', 'https://openalex.org/W2059849128', 'https://openalex.org/W2060498973', 'https://openalex.org/W2060622010', 'https://openalex.org/W2061122445', 'https://openalex.org/W2061809134', 'https://openalex.org/W2062645551', 'https://openalex.org/W2062956916', 'https://openalex.org/W2063386257', 'https://openalex.org/W2064940761', 'https://openalex.org/W2065324547', 'https://openalex.org/W2065428010', 'https://openalex.org/W2065482625', 'https://openalex.org/W2066188523', 'https://openalex.org/W2066658287', 'https://openalex.org/W2066844862', 'https://openalex.org/W2068051049', 'https://openalex.org/W2068373441', 'https://openalex.org/W2068938290', 'https://openalex.org/W2069908019', 'https://openalex.org/W2070918367', 'https://openalex.org/W2071133792', 'https://openalex.org/W2071559959', 'https://openalex.org/W2071604862', 'https://openalex.org/W2071878160', 'https://openalex.org/W2072278550', 'https://openalex.org/W2072792277', 'https://openalex.org/W2072996532', 'https://openalex.org/W2073014177', 'https://openalex.org/W2073936879', 'https://openalex.org/W2074043564', 'https://openalex.org/W2074565896', 'https://openalex.org/W2075040640', 'https://openalex.org/W2075512001', 'https://openalex.org/W2076005872', 'https://openalex.org/W2076371469', 'https://openalex.org/W2076657829', 'https://openalex.org/W2077424333', 'https://openalex.org/W2077807611', 'https://openalex.org/W2078567164', 'https://openalex.org/W2079414701', 'https://openalex.org/W2079918827', 'https://openalex.org/W2080022017', 'https://openalex.org/W2081306437', 'https://openalex.org/W2081480486', 'https://openalex.org/W2081651425', 'https://openalex.org/W2081814783', 'https://openalex.org/W2082299492', 'https://openalex.org/W2082570455', 'https://openalex.org/W2083417635', 'https://openalex.org/W2083641866', 'https://openalex.org/W2083807678', 'https://openalex.org/W2083813044', 'https://openalex.org/W2083882281', 'https://openalex.org/W2083889072', 'https://openalex.org/W2084495046', 'https://openalex.org/W2085166047', 'https://openalex.org/W2085619230', 'https://openalex.org/W2088263007', 'https://openalex.org/W2089513339', 'https://openalex.org/W2090029073', 'https://openalex.org/W2090062054', 'https://openalex.org/W2090889170', 'https://openalex.org/W2091327920', 'https://openalex.org/W2091756835', 'https://openalex.org/W2094288694', 'https://openalex.org/W2094338926', 'https://openalex.org/W2094983365', 'https://openalex.org/W2095317536', 'https://openalex.org/W2095332711', 'https://openalex.org/W2096152861', 'https://openalex.org/W2105404460', 'https://openalex.org/W2113236375', 'https://openalex.org/W2115744037', 'https://openalex.org/W2117427248', 'https://openalex.org/W2117843399', 'https://openalex.org/W2121241932', 'https://openalex.org/W2124194101', 'https://openalex.org/W2125286409', 'https://openalex.org/W2133860024', 'https://openalex.org/W2159100904', 'https://openalex.org/W2165827769', 'https://openalex.org/W2334711357', 'https://openalex.org/W2489845635', 'https://openalex.org/W2562039948', 'https://openalex.org/W268111110', 'https://openalex.org/W2977474616', 'https://openalex.org/W2987637782', 'https://openalex.org/W3104845794', 'https://openalex.org/W3163772931', 'https://openalex.org/W52771134', 'https://openalex.org/W79804319'], 'related_works': ['https://openalex.org/W2371667353', 'https://openalex.org/W2354849829', 'https://openalex.org/W2340026608', 'https://openalex.org/W2074178834', 'https://openalex.org/W2058938207', 'https://openalex.org/W2040771701', 'https://openalex.org/W1993156593', 'https://openalex.org/W1989487550', 'https://openalex.org/W1987501789', 'https://openalex.org/W1984488440'], 'abstract_inverted_index': {'Ion': [0], 'beam': [1, 54, 74, 88, 151, 164], 'irradiation': [2, 172, 191, 219], 'is': [3, 50, 139, 281], 'a': [4, 14, 40, 44, 130, 147, 156, 225, 231, 271, 278, 283, 295], 'potential': [5], 'tool': [6, 34], 'for': [7, 35, 57, 62, 109, 142, 207], 'phase': [8, 37, 158, 184, 236], 'formation': [9], 'and': [10, 21, 69, 99, 102, 192, 239, 261], 'material': [11, 275], 'modification': [12, 71], 'as': [13, 129, 141], 'non-equilibrium': [15, 226], 'technique.': [16], 'Localized': [17], 'rise': [18], 'in': [19, 79, 126, 214, 235, 274], 'temperature': [20], 'ultra': [22], 'fast': [23], '(∼10−12': [24], 's)': [25], 'dissipations': [26], 'of': [27, 42, 47, 59, 67, 84, 119, 133, 182, 195, 211, 216, 251, 265, 297], 'impinging': [28, 267], 'energy': [29, 103, 263], 'make': [30], 'it': [31], 'an': [32, 110, 143], 'attractive': [33], 'metastable': [36], 'formation.': [38], 'As': [39], 'matter': [41], 'fact,': [43], 'major': [45], 'component': [46], 'materials': [48, 60], 'science': [49], 'dominated': [51], 'by': [52, 72, 162, 168, 189], 'ion': [53, 73, 87, 112, 150, 163, 218, 299], 'methods,': [55], 'either': [56, 167, 196], 'synthesis': [58, 66], 'or': [61, 152, 173, 198], 'its': [63, 115, 134], 'characterization.': [64], 'The': [65, 117], 'nanostructures,': [68], 'their': [70], 'technique': [75, 89], 'will': [76, 90, 122, 288], 'be': [77, 91, 124, 160, 187, 289], 'discussed': [78, 92], 'this': [80, 127, 292], 'review': [81], 'article.': [82], 'Formation': [83], 'nanostructures': [85], 'using': [86, 146, 169], 'first.': [93], 'Depending': [94], 'on': [95, 177, 291], 'species': [96], '(e.g.,': [97], 'mass': [98], 'charge': [100], 'state)': [101], 'range,': [104], 'there': [105], 'are': [106, 205], 'various': [107], 'modes': [108], 'energetic': [111], 'to': [113, 233], 'dissipate': [114], 'energy.': [116], 'role': [118, 232, 273], 'the': [120, 208, 252, 266], 'electron': [121, 153, 190], 'also': [123, 186, 256], 'covered': [125], 'article': [128], 'basic': [131], 'principle': [132], 'interaction': [135], 'with': [136, 245, 294], 'matter,': [137], 'which': [138], 'same': [140], 'ion.': [144], 'By': [145], 'simple': [148], 'reactive': [149, 174], 'induced': [154], 'deposition,': [155], 'secondary': [157, 183], 'can': [159, 185], 'nucleated': [161], 'mixing': [165], 'techniques,': [166], 'inert': [170], 'gas': [171, 175], 'implantation': [176, 194, 202], 'any': [178], 'desired': [179], 'substrate.': [180], 'Nucleation': [181], 'executed': [188], 'direct': [193], 'negative': [197], 'positive': [199], 'ions.': [200], 'Post': [201], 'annealing': [203], 'processes': [204, 222], 'required': [206], 'complete': [209], 'growth': [210], 'clusters': [212], 'formed': [213], 'most': [215], 'these': [217, 258], 'techniques.': [220], 'Implantation': [221], 'being': [223], 'inherently': [224], 'technique,': [227], 'defects': [228], 'always': [229], 'have': [230], 'play': [234, 270], 'formation,': [237], 'amorphization,': [238], 'beyond': [240], '(blister': [241], 'formation).': [242], 'When': [243], 'implanted': [244], 'large': [246], 'energy,': [247], 'even': [248], 'electrons,': [249], 'one': [250], 'lightest': [253], 'charged': [254, 268], 'particles,': [255], 'manifest': [257], 'properties.': [259], 'Electronic': [260], 'nuclear': [262], 'losses': [264], 'particle': [269], 'crucial': [272], 'modification.': [276], 'Doping': [277], 'nanocluster,': [279], 'however,': [280], 'still': [282], 'controversial': [284], 'topic.': [285], 'Some': [286], 'light': [287], 'shed': [290], 'topic': [293], 'discussion': [296], 'focused': [298], 'beam.': [300]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2121285255', 'counts_by_year': [{'year': 2024, 'cited_by_count': 3}, {'year': 2023, 'cited_by_count': 4}, {'year': 2022, 'cited_by_count': 3}, {'year': 2021, 'cited_by_count': 2}, {'year': 2020, 'cited_by_count': 4}, {'year': 2019, 'cited_by_count': 3}, {'year': 2018, 'cited_by_count': 9}, {'year': 2017, 'cited_by_count': 10}, {'year': 2016, 'cited_by_count': 5}, {'year': 2015, 'cited_by_count': 4}, {'year': 2014, 'cited_by_count': 10}, {'year': 2013, 'cited_by_count': 3}, {'year': 2012, 'cited_by_count': 7}], 'updated_date': '2024-09-10T01:56:30.299191', 'created_date': '2016-06-24'}