Title: A simple system for on-die measurement of atto-Farad capacitance
Abstract: Charge Injection Error Free (CIEF) Charge-Base Capacitance Measurement (CBCM) technique provides a simple way for accurate measurements of on-chip interconnect parasitic capacitance. We report here for the first time capacitance measurements of on-chip interconnect with resolution values of 1aF or better. We analyze the setup requirements to allow such capability, and show stable coupling capacitance measurement results at the 1aF resolution.
Publication Year: 2011
Publication Date: 2011-04-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 8
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