Title: Practical Considerations for Measurements of Test Structures for Dielectric Characterization
Abstract: This paper presents a method for measuring the complex permittivity of dielectric material on a dielectric/metal stack. A series of circular capacitor and transmission line test structures are designed and fabricated. The methodology has been verified by measuring the dielectric constant of a known SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer using Capacitance-Voltage (C-V) measurement and scattering parameter (S-parameter) measurements. The combination of C-V measurement and S-parameter measurement is shown to be suitable for characterization of dielectric material on the complex cross-sections.
Publication Year: 2009
Publication Date: 2009-03-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 4
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