Title: Low Dose Rate Effects in Shallow Trench Isolation Regions
Abstract: Dose-rate effects are studied in shallow trench isolation regions. Increased damage is observed at low dose rate, with a different dose dependence compared to tests done at high dose rate. A three-dimensional modeling program was used to show that charge trapping occurs much deeper in the trench region when sufficient charge is present to reduce the field in the trench.
Publication Year: 2010
Publication Date: 2010-12-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 26
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