Abstract:The advantages of rapid spectral scanning have been combined with the inherent accuracy of the compensating ellipsometer operated in the polarizer-compensator–sample-analyzer configuration. Wavelength...The advantages of rapid spectral scanning have been combined with the inherent accuracy of the compensating ellipsometer operated in the polarizer-compensator–sample-analyzer configuration. Wavelength is scanned over the visible–UV (370–720 nm) at a maximum rate of 114 nm/s by rotating a continuously variable interference filter. A three-reflection Fresnel rhomb serves as the achromatic quarter-wave compensator. A microcomputer is used to collect spectroscopic measurements, perform instrument calibrations, digital filtering, and data interpretation.Read More