Title: VLSI Microfabrication Technologies and MEMS
Abstract: The enormous developments in electronic microfabrication technologies have led to very large scale integration (VLSI) and emergence of an era of microelectromechanical systems (MEMS). The fascinating aspect of the field of MEMS and microdevices is its multidimensional nature. The various materials used and VLSI microfabrication technologies in general and microelectromechanical devices in particular have been presented in this paper. Some of their technological and application aspects have been reviewed. The trends in VLSI technology and MEMS have also been given.
Publication Year: 2001
Publication Date: 2001-01-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 1
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