Title: Prism-assisted inclined UV lithography for 3D microstructure fabrication
Abstract:A prism-assisted inclined ultraviolet (UV) lithography technique is introduced for the fabrication of three-dimensional (3D) microstructures. Slanted structures with exposure angles ranging from 0° to...A prism-assisted inclined ultraviolet (UV) lithography technique is introduced for the fabrication of three-dimensional (3D) microstructures. Slanted structures with exposure angles ranging from 0° to 60° in SU-8 photoresist have been easily achieved without immersion in the index matching liquid. The fabrication process of multidirectional slanted structures can be simplified by one-step UV exposure using a prism with multidirectional side surfaces. A corner prism and a cone prism have been used in our experiment to demonstrate this concept. Upside-down tripod structures and horn structures have been fabricated in one-step exposures. The effective exposure area as one key parameter of the one-step exposure is analyzed for practical applications. Examples of various 3D microstructures fabricated by this method are presented.Read More
Publication Year: 2012
Publication Date: 2012-07-09
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 23
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