Title: An electro-optical sensor for microdisplacement measurement and control
Abstract: Development of a new type of noncontact electrooptical sensor based on the optical triangulation principle is presented. The sensor exhibits maximum sensitivity with a resolution of 0.01 mu m for the displacement of polished flat surfaces. The sensitivity of displacement of curved and rough surfaces is also good. The experimental set-up described provides a linear range of +or-75 mu m which could be increased by changing the optical parameters of the sensor, if needed.
Publication Year: 1984
Publication Date: 1984-10-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 20
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