High‐quality AlN epitaxial films on (0001)‐faced sapphire and 6H‐SiC substrate

Name: Work Video:
Duration: 3 min 30 s
T. Shibata; Kei Asai; S. Sumiya; M. Mouri; Mitsuhiro Tanaka; Osamu Oda; Hiroyuki Katsukawa; Hideto Miyake; K. Hiramatsu
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