Title: <title>Micromachined accelerometer based on electron tunneling</title>
Abstract: In this paper, a new micromachined tunneling accelerometer is described. Using the bulk-silicon fabrication technology and the silicon/glass electrostatic bonding process, a sandwich structure tunneling accelerometer has been fabricated and tested. In order to reduce the low frequency noise, the feedback circuit has been improved by adding oscillator and demodulator. The first prototype has a resolution of approximately 1e<SUP>-6</SUP>g/ (root) Hz and can survive with at least 50g shocking.
Publication Year: 1999
Publication Date: 1999-09-29
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 8
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