Title: Nanoscaled interdigitated electrode arrays for biochemical sensors
Abstract: Nanoscaled interdigitated electrode arrays were made with deep UV lithography. Electrode widths and spacings from 500 down to 250 nm were achieved on large active areas (0.5×1 mm). These electrodes allow for the detection of affinity binding of biomolecular structures (e.g. antigens, DNA) by impedimetric measurements. Such a sensor with Pd electrodes on SiO2 is developed and theoretically analysed. It was experimentally characterised in KCl solutions demonstrating its bulk-insensitive behaviour and the immobilisation of glucose oxidase (GOD) could be monitored by measuring the double layer impedance.
Publication Year: 1998
Publication Date: 1998-06-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 385
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