Title: Advancing Decal-Transfer Lithography with a Reusable PDMS-Coated Nanoscale Stamp
Abstract:We present nanoscale decal transfer lithography (DTL) in which the conventional poly(dimethylsiloxane) (PDMS) stamp is alternated with a reusable PDMS-coated nanoscale stamp. Owing to the PDMS thin la...We present nanoscale decal transfer lithography (DTL) in which the conventional poly(dimethylsiloxane) (PDMS) stamp is alternated with a reusable PDMS-coated nanoscale stamp. Owing to the PDMS thin layer coating strategy, we were able to promote the capability of conventional DTL. First, we succeeded in progressing toward a DTL process that extends to the nanometer scale. Second, we were able to empower the DTL stamp to be used several times.Read More
Publication Year: 2007
Publication Date: 2007-08-28
Language: en
Type: article
Indexed In: ['crossref', 'pubmed']
Access and Citation
Cited By Count: 13
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