Silane dissociation products in deposition discharges

Name: Work Video:
Duration: 3 min 30 s
James R. Doyle; D. A. Doughty; A. Gallagher
{'id': 'https://openalex.org/W2053115075', 'doi': 'https://doi.org/10.1063/1.346186', 'title': 'Silane dissociation products in deposition discharges', 'display_name': 'Silane dissociation products in deposition discharges', 'publication_year': 1990, 'publication_date': '1990-11-01', 'ids': {'openalex': 'https://openalex.org/W2053115075', 'doi': 'https://doi.org/10.1063/1.346186', 'mag': '2053115075'}, 'language': 'en', 'primary_location': {'is_oa': False, 'landing_page_url': 'https://doi.org/10.1063/1.346186', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S187991544', 'display_name': 'Journal of Applied Physics', 'issn_l': '0021-8979', 'issn': ['0021-8979', '1089-7550', '1520-8850'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320257', 'host_organization_name': 'American Institute of Physics', 'host_organization_lineage': ['https://openalex.org/P4310320257'], 'host_organization_lineage_names': ['American Institute of Physics'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}, 'type': 'article', 'type_crossref': 'journal-article', 'indexed_in': ['crossref'], 'open_access': {'is_oa': False, 'oa_status': 'closed', 'oa_url': None, 'any_repository_has_fulltext': False}, 'authorships': [{'author_position': 'first', 'author': {'id': 'https://openalex.org/A5045296789', 'display_name': 'James R. Doyle', 'orcid': 'https://orcid.org/0000-0003-3406-9228'}, 'institutions': [{'id': 'https://openalex.org/I1321296531', 'display_name': 'National Institute of Standards and Technology', 'ror': 'https://ror.org/05xpvk416', 'country_code': 'US', 'type': 'government', 'lineage': ['https://openalex.org/I1321296531', 'https://openalex.org/I1343035065']}, {'id': 'https://openalex.org/I188538660', 'display_name': 'University of Colorado Boulder', 'ror': 'https://ror.org/02ttsq026', 'country_code': 'US', 'type': 'education', 'lineage': ['https://openalex.org/I188538660']}, {'id': 'https://openalex.org/I137473845', 'display_name': 'Joint Institute for Laboratory Astrophysics', 'ror': 'https://ror.org/008hybe55', 'country_code': 'US', 'type': 'facility', 'lineage': ['https://openalex.org/I1321296531', 'https://openalex.org/I1343035065', 'https://openalex.org/I137473845', 'https://openalex.org/I188538660']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'J. R. Doyle', 'raw_affiliation_strings': ['Joint Institute for Laboratory Astrophysics, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado 80309-0440'], 'affiliations': [{'raw_affiliation_string': 'Joint Institute for Laboratory Astrophysics, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado 80309-0440', 'institution_ids': ['https://openalex.org/I1321296531', 'https://openalex.org/I188538660', 'https://openalex.org/I137473845']}]}, {'author_position': 'middle', 'author': {'id': 'https://openalex.org/A5008917810', 'display_name': 'D. A. Doughty', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I188538660', 'display_name': 'University of Colorado Boulder', 'ror': 'https://ror.org/02ttsq026', 'country_code': 'US', 'type': 'education', 'lineage': ['https://openalex.org/I188538660']}, {'id': 'https://openalex.org/I137473845', 'display_name': 'Joint Institute for Laboratory Astrophysics', 'ror': 'https://ror.org/008hybe55', 'country_code': 'US', 'type': 'facility', 'lineage': ['https://openalex.org/I1321296531', 'https://openalex.org/I1343035065', 'https://openalex.org/I137473845', 'https://openalex.org/I188538660']}, {'id': 'https://openalex.org/I1321296531', 'display_name': 'National Institute of Standards and Technology', 'ror': 'https://ror.org/05xpvk416', 'country_code': 'US', 'type': 'government', 'lineage': ['https://openalex.org/I1321296531', 'https://openalex.org/I1343035065']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'D. A. Doughty', 'raw_affiliation_strings': ['Joint Institute for Laboratory Astrophysics, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado 80309-0440'], 'affiliations': [{'raw_affiliation_string': 'Joint Institute for Laboratory Astrophysics, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado 80309-0440', 'institution_ids': ['https://openalex.org/I188538660', 'https://openalex.org/I137473845', 'https://openalex.org/I1321296531']}]}, {'author_position': 'last', 'author': {'id': 'https://openalex.org/A5108422961', 'display_name': 'A. Gallagher', 'orcid': None}, 'institutions': [{'id': 'https://openalex.org/I188538660', 'display_name': 'University of Colorado Boulder', 'ror': 'https://ror.org/02ttsq026', 'country_code': 'US', 'type': 'education', 'lineage': ['https://openalex.org/I188538660']}, {'id': 'https://openalex.org/I137473845', 'display_name': 'Joint Institute for Laboratory Astrophysics', 'ror': 'https://ror.org/008hybe55', 'country_code': 'US', 'type': 'facility', 'lineage': ['https://openalex.org/I1321296531', 'https://openalex.org/I1343035065', 'https://openalex.org/I137473845', 'https://openalex.org/I188538660']}, {'id': 'https://openalex.org/I1321296531', 'display_name': 'National Institute of Standards and Technology', 'ror': 'https://ror.org/05xpvk416', 'country_code': 'US', 'type': 'government', 'lineage': ['https://openalex.org/I1321296531', 'https://openalex.org/I1343035065']}], 'countries': ['US'], 'is_corresponding': False, 'raw_author_name': 'A. Gallagher', 'raw_affiliation_strings': ['Joint Institute for Laboratory Astrophysics, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado 80309-0440'], 'affiliations': [{'raw_affiliation_string': 'Joint Institute for Laboratory Astrophysics, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado 80309-0440', 'institution_ids': ['https://openalex.org/I188538660', 'https://openalex.org/I137473845', 'https://openalex.org/I1321296531']}]}], 'institution_assertions': [], 'countries_distinct_count': 1, 'institutions_distinct_count': 3, 'corresponding_author_ids': [], 'corresponding_institution_ids': [], 'apc_list': {'value': 3500, 'currency': 'USD', 'value_usd': 3500, 'provenance': 'doaj'}, 'apc_paid': None, 'fwci': 6.658, 'has_fulltext': True, 'fulltext_origin': 'ngrams', 'cited_by_count': 94, 'citation_normalized_percentile': {'value': 0.965541, 'is_in_top_1_percent': False, 'is_in_top_10_percent': True}, 'cited_by_percentile_year': {'min': 96, 'max': 97}, 'biblio': {'volume': '68', 'issue': '9', 'first_page': '4375', 'last_page': '4384'}, 'is_retracted': False, 'is_paratext': False, 'primary_topic': {'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.999, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, 'topics': [{'id': 'https://openalex.org/T10781', 'display_name': 'Plasma Diagnostics and Applications', 'score': 0.999, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10623', 'display_name': 'Thin-Film Transistor Technologies', 'score': 0.9962, 'subfield': {'id': 'https://openalex.org/subfields/2208', 'display_name': 'Electrical and Electronic Engineering'}, 'field': {'id': 'https://openalex.org/fields/22', 'display_name': 'Engineering'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}, {'id': 'https://openalex.org/T10478', 'display_name': 'Diamond and Carbon-based Materials Research', 'score': 0.9945, 'subfield': {'id': 'https://openalex.org/subfields/2505', 'display_name': 'Materials Chemistry'}, 'field': {'id': 'https://openalex.org/fields/25', 'display_name': 'Materials Science'}, 'domain': {'id': 'https://openalex.org/domains/3', 'display_name': 'Physical Sciences'}}], 'keywords': [{'id': 'https://openalex.org/keywords/silanes', 'display_name': 'Silanes', 'score': 0.9705584}, {'id': 'https://openalex.org/keywords/deposition', 'display_name': 'Deposition', 'score': 0.46927086}], 'concepts': [{'id': 'https://openalex.org/C2778183973', 'wikidata': 'https://www.wikidata.org/wiki/Q2476769', 'display_name': 'Silanes', 'level': 3, 'score': 0.9705584}, {'id': 'https://openalex.org/C2778024649', 'wikidata': 'https://www.wikidata.org/wiki/Q410572', 'display_name': 'Silane', 'level': 2, 'score': 0.9608336}, {'id': 'https://openalex.org/C102931765', 'wikidata': 'https://www.wikidata.org/wiki/Q189673', 'display_name': 'Dissociation (chemistry)', 'level': 2, 'score': 0.7828661}, {'id': 'https://openalex.org/C185592680', 'wikidata': 'https://www.wikidata.org/wiki/Q2329', 'display_name': 'Chemistry', 'level': 0, 'score': 0.6154721}, {'id': 'https://openalex.org/C544956773', 'wikidata': 'https://www.wikidata.org/wiki/Q670', 'display_name': 'Silicon', 'level': 2, 'score': 0.525867}, {'id': 'https://openalex.org/C113196181', 'wikidata': 'https://www.wikidata.org/wiki/Q485223', 'display_name': 'Analytical Chemistry (journal)', 'level': 2, 'score': 0.4885691}, {'id': 'https://openalex.org/C124681953', 'wikidata': 'https://www.wikidata.org/wiki/Q339062', 'display_name': 'Decomposition', 'level': 2, 'score': 0.47564742}, {'id': 'https://openalex.org/C64297162', 'wikidata': 'https://www.wikidata.org/wiki/Q1987070', 'display_name': 'Deposition (geology)', 'level': 3, 'score': 0.46927086}, {'id': 'https://openalex.org/C147789679', 'wikidata': 'https://www.wikidata.org/wiki/Q11372', 'display_name': 'Physical chemistry', 'level': 1, 'score': 0.22492677}, {'id': 'https://openalex.org/C178790620', 'wikidata': 'https://www.wikidata.org/wiki/Q11351', 'display_name': 'Organic chemistry', 'level': 1, 'score': 0.1287252}, {'id': 'https://openalex.org/C151730666', 'wikidata': 'https://www.wikidata.org/wiki/Q7205', 'display_name': 'Paleontology', 'level': 1, 'score': 0.0}, {'id': 'https://openalex.org/C2816523', 'wikidata': 'https://www.wikidata.org/wiki/Q180184', 'display_name': 'Sediment', 'level': 2, 'score': 0.0}, {'id': 'https://openalex.org/C86803240', 'wikidata': 'https://www.wikidata.org/wiki/Q420', 'display_name': 'Biology', 'level': 0, 'score': 0.0}], 'mesh': [], 'locations_count': 1, 'locations': [{'is_oa': False, 'landing_page_url': 'https://doi.org/10.1063/1.346186', 'pdf_url': None, 'source': {'id': 'https://openalex.org/S187991544', 'display_name': 'Journal of Applied Physics', 'issn_l': '0021-8979', 'issn': ['0021-8979', '1089-7550', '1520-8850'], 'is_oa': False, 'is_in_doaj': False, 'is_core': True, 'host_organization': 'https://openalex.org/P4310320257', 'host_organization_name': 'American Institute of Physics', 'host_organization_lineage': ['https://openalex.org/P4310320257'], 'host_organization_lineage_names': ['American Institute of Physics'], 'type': 'journal'}, 'license': None, 'license_id': None, 'version': None, 'is_accepted': False, 'is_published': False}], 'best_oa_location': None, 'sustainable_development_goals': [{'score': 0.62, 'display_name': 'Clean water and sanitation', 'id': 'https://metadata.un.org/sdg/6'}], 'grants': [], 'datasets': [], 'versions': [], 'referenced_works_count': 24, 'referenced_works': ['https://openalex.org/W1978552157', 'https://openalex.org/W1981492282', 'https://openalex.org/W1982642087', 'https://openalex.org/W1989042213', 'https://openalex.org/W1992902787', 'https://openalex.org/W1998777910', 'https://openalex.org/W2000245944', 'https://openalex.org/W2003397929', 'https://openalex.org/W2014206557', 'https://openalex.org/W2018463445', 'https://openalex.org/W2033669153', 'https://openalex.org/W2040053271', 'https://openalex.org/W2041378425', 'https://openalex.org/W2048828497', 'https://openalex.org/W2048937474', 'https://openalex.org/W2054927327', 'https://openalex.org/W2056293191', 'https://openalex.org/W2059250253', 'https://openalex.org/W2067665802', 'https://openalex.org/W2067985998', 'https://openalex.org/W2078267130', 'https://openalex.org/W2088558188', 'https://openalex.org/W2986608867', 'https://openalex.org/W4235259244'], 'related_works': ['https://openalex.org/W2313982833', 'https://openalex.org/W2094589615', 'https://openalex.org/W2087908066', 'https://openalex.org/W2087484018', 'https://openalex.org/W2074789512', 'https://openalex.org/W2073695308', 'https://openalex.org/W2059940001', 'https://openalex.org/W2053115075', 'https://openalex.org/W1995483937', 'https://openalex.org/W1976928460'], 'abstract_inverted_index': {'Time-dependent': [0], 'production': [1, 29, 60], 'of': [2, 27, 55, 64], 'higher-silane': [3, 28], 'gases': [4], 'and': [5, 16, 19, 67], 'a-Si:H': [6], 'film': [7, 59], 'are': [8, 43, 52], 'measured': [9, 75], 'relative': [10], 'to': [11], 'decomposed': [12], 'silane': [13, 33], 'in': [14, 30, 69], 'rf': [15], 'dc,': [17], 'hot': [18], 'cold': [20], 'cathode,': [21], 'static-gas': [22], 'discharges.': [23], 'From': [24, 73], 'the': [25, 58, 62, 70, 74, 84], 'absence': [26], 'very': [31], 'low': [32], 'partial-pressure': [34], 'discharges,': [35], 'it': [36], 'is': [37, 83], 'inferred': [38], 'that': [39, 81], 'most': [40], 'higher': [41, 50], 'silanes': [42, 51], 'produced': [44], 'by': [45], 'gas-phase': [46], 'SiH2-initiated': [47], 'reactions.': [48], 'The': [49], 'thus': [53], 'tracers': [54], 'SiH2,': [56], 'while': [57], 'traces': [61], 'fraction': [63], 'H,': [65], 'SiH,': [66], 'SiH3': [68], 'initial': [71], 'decomposition.': [72], 'stable': [76], 'product': [77], 'yields,': [78], 'we': [79], 'deduce': [80], 'SiH4→SiH2+2H': [82], 'dominant': [85], 'electron-collisional': [86], 'dissociation': [87], 'channel.': [88]}, 'cited_by_api_url': 'https://api.openalex.org/works?filter=cites:W2053115075', 'counts_by_year': [{'year': 2023, 'cited_by_count': 1}, {'year': 2021, 'cited_by_count': 1}, {'year': 2020, 'cited_by_count': 1}, {'year': 2019, 'cited_by_count': 3}, {'year': 2018, 'cited_by_count': 2}, {'year': 2016, 'cited_by_count': 1}, {'year': 2015, 'cited_by_count': 2}, {'year': 2013, 'cited_by_count': 1}, {'year': 2012, 'cited_by_count': 3}], 'updated_date': '2024-12-12T09:42:32.134531', 'created_date': '2016-06-24'}
Publication Information

Basic Information

Access and Citation

AI Researcher Chatbot

Primary Location

Authors

Topics

Keywords

Related Works
