Title: <title>Optical Properties Of Sputtered Si: H</title>
Abstract: Sputtered Si:H is a very promising material for use in thin-film solar cells, solar selective absorbers and optical coatings for the near infrared region. Optical property-composition relationships have been determined for Si:H coatings having wide ranges of H content and Si-H bonding. The dependence of the optical absorption edge, optical band gap and refractive index at 2 μm wavelength on H content and Si-H bonding is described. Microstructural and topographical features of the films that influence their absorption and scattering characteristics are discussed. Composition and bonding diagrams used to select deposition conditions for the desired optical properties are also presented. Finally, multilayer Si:H/Si0<sub>2</sub> all-dielectric laser mirrors with reflectances greater than 99% at 1.315, 2.7 and 3.8 μm are described to illustrate the application of these coatings.
Publication Year: 1982
Publication Date: 1982-04-12
Language: en
Type: article
Indexed In: ['crossref']
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