Title: Development of a 2.45 GHz electron cyclotron resonance ion source for ion-implanter application
Abstract: A compact electron cyclotron resonance (ECR) ion source has been designed at 2.45 GHz microwave frequency for ion implanter and is being tested. The design is based on a straightforward application of the method adopted for conventional ECR ion sources for multiply charged ions: a closed ECR surface completely contained in the plasma chamber. Initial tests have shown a promising indication: a total current of about 7 mA of Ar ions has been extracted at 25 kV extraction voltage. Design features and preliminary performance are reported.
Publication Year: 1998
Publication Date: 1998-02-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 5
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