Title: Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide
Abstract: We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS.
Publication Year: 2011
Publication Date: 2011-01-01
Language: en
Type: article
Indexed In: ['crossref', 'pubmed']
Access and Citation
Cited By Count: 10
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