Title: SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks
Abstract: ETRI JournalVolume 30, Issue 4 p. 516-525 Regular PaperFree Access SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks Sunglyul Maeng, Sunglyul MaengSearch for more papers by this authorPrasanta Guha, Prasanta GuhaSearch for more papers by this authorFlorin Udrea, Florin UdreaSearch for more papers by this authorSyed Z. Ali, Syed Z. AliSearch for more papers by this authorSumita Santra, Sumita SantraSearch for more papers by this authorJulian Gardner, Julian GardnerSearch for more papers by this authorJonghyurk Park, Jonghyurk ParkSearch for more papers by this authorSang-Hyeob Kim, Sang-Hyeob KimSearch for more papers by this authorSeung Eon Moon, Seung Eon MoonSearch for more papers by this authorKang-Ho Park, Kang-Ho ParkSearch for more papers by this authorJong-Dae Kim, Jong-Dae KimSearch for more papers by this authorYoungjin Choi, Youngjin ChoiSearch for more papers by this authorWilliam I. Milne, William I. MilneSearch for more papers by this author Sunglyul Maeng, Sunglyul MaengSearch for more papers by this authorPrasanta Guha, Prasanta GuhaSearch for more papers by this authorFlorin Udrea, Florin UdreaSearch for more papers by this authorSyed Z. Ali, Syed Z. AliSearch for more papers by this authorSumita Santra, Sumita SantraSearch for more papers by this authorJulian Gardner, Julian GardnerSearch for more papers by this authorJonghyurk Park, Jonghyurk ParkSearch for more papers by this authorSang-Hyeob Kim, Sang-Hyeob KimSearch for more papers by this authorSeung Eon Moon, Seung Eon MoonSearch for more papers by this authorKang-Ho Park, Kang-Ho ParkSearch for more papers by this authorJong-Dae Kim, Jong-Dae KimSearch for more papers by this authorYoungjin Choi, Youngjin ChoiSearch for more papers by this authorWilliam I. Milne, William I. MilneSearch for more papers by this author First published: 01 August 2008 https://doi.org/10.4218/etrij.08.0108.0101Citations: 21 Sunglyul Maeng (phone: +82 63 291 0348, email: [email protected]) was with Convergence Components & Materials Research Laboratory, ETRI, Daejeon, Rep. of Korea, and is now with the Department of Electrical and Electronic Engineering, Woosuk University, Wanju, Jeonbuk, Rep. of Korea Prasanta Guha ([email protected]), Florin Udrea (email: [email protected]), Syed Z. Ali ([email protected]), Sumita Santra ([email protected]), Youngjin Choi (email: [email protected]), and William I. Milne (email: [email protected]) are with the Centre for Advanced Photonics & Electronics, University of Cambridge, Cambridge, UK. Julian Gardner (email: [email protected]) is with the School of Engineering, University of Warwick, Coventry, UK. Jonghyurk Park (email: [email protected]), Sang-Hyeob Kim (email: [email protected]), Seung Eon Moon (email: [email protected]), Kang-Ho Park (email: [email protected]), and Jong-Dae Kim (email: [email protected]) are with the Convergence Components & Materials Research Laboratory, ETRI, Daejeon, Rep. of Korea. AboutPDF ToolsExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Abstract This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at 200°C and showed a good response to 100 ppb NO2 gas. References 1S. Fukunaga et al., "Development of Ubiquitous Sensor Network," Oki Technical Review, Vol. 71, no. 4, Oct. 2004, pp. 24–29. 2D. Culler, D. Estrin, and M. Srivastava, "Overview of Sensor Networks," Computer, Aug. 2004, pp. 41–49. 3J.W. Gardner, V.K. Varadan, and O.O. Awadelkarim, Microsensors, MEMES and Smart Devices, Wiley, Chichester, 2001, p. 283. 4E. Jones, "Overview of the Principles and Current Technology of the Main Sensor Types," Solid State Gas Sensors, P.T. Moseley, B.C. Tofield (eds.), Adam Hilger, Bristol, 1987, pp. 17–31. 5U. Dibbern, "A Substrate for Thin-Film Gas Sensor in Microelectronic Technology," Sens. Actuators B, Vol. 2, no. 1, Mar. 1990, pp. 63–67. 6V. Demarne and A. Grisel, "An Integrated Low-Power Thin–Film CO Gas Sensor on Silicon," Sens. Actuators B, Vol. 4, no. 3/4, June 1991, pp. 539–543. 7P. Krebs and A. Grisel, "A Low Power Integrated Catalytic Gas Sensor," Sens. Actuators B, Vol. 13/14, May 1993, pp. 155–158. 8M. Gall, "The Silicon Planar Pellistor Array: A Detection Unit for Combustible Gases," Sens. Actuators B, Vol. 15/16, Oct. 1993, pp. 260–264. 9M. Zanini et al., "Fabrication and Properties of a Si-Based High-Sensitivity Microcalorimetric Gas Sensor," Sens. Actuators A, Vol. 48, no. 3, May 1995, pp. 187–192. 10J.W. Gardner et al., "Integrated Array Sensor for Detecting Organic Solvents," Sens. Actuators B, Vol. 26/27, no. 1-3, May 1995, pp. 135–167. 11J. Suehle et al., "Tin Oxide Gas Sensor Fabricated Using CMOS Micro-hotplates and in situ Processing," IEEE Electron Dev. Letts., Vol. 14, no. 3, Mar. 1993, pp. 118–120. 12F. Udrea et al., "Design and Simulations of SOI CMOS Micro-hotplate Gas Sensors," Sens. Actuators B, Vol. 78, 2001, pp. 180–190. 13P.K. Guha et al., "Novel Design and Characterisation of SOI CMOS Micro-hotplates for High Temperature Gas Sensors," Sens. Actuators B, Vol. 127, 2007, pp. 260–266. 14J. Kong, "Nanotube Molecular Wires as Chemical Sensors," Science, Vol. 287, no. 5453, 2000, pp. 622–625. 15A. Kolmakov et al., "Detection of CO and O2 Using Tin Oxide Nanowrie Sensors," Advanced Materials, Vol. 15, 2003, pp. 997–1000. 16L. Liao et al., "The Sensitivity of Gas Sensor Based on Single ZnO Nanowire Modulated by Helium Ion Radiation," Appl. Phys. Lett., Vol. 91, 2007, 173110. 17F. Udrea et al., "Three Technologies for a Smart Miniaturized Gas Sensor: SOI CMOS, Micromachining, and CNTs: Challenges and Performance," Proc. 2007 IEEE Int. Electron Devices Mtg Technical Digest (Washington D.C.), no. 332, Dec. 2007, pp. 831–834. 18M.S. Haque et al., "On-Chip Deposition of Carbon Nanotubes Using CMOS Microplates," Nanotechnology, Vol. 19, 2008, 025607. 19S.M.C. Vieira, et al., "Use of Nanocomposites to Increase Electrical 'Gain' in Chemical Sensors," Appl. Phys. Lett., Vol. 91, 2007, 203111. 20S. Maeng et al., "Synthesis of Novel Standing SnO2 Nanoslab Network and Its Application in NO2 Sensing," IUMRS-ICEM 2008, Sydney, Australia, July 28-Aug. 1, 2008, accepted for oral presentation. 21O. Wan et al., "Fabrication and Ethanol Sensing Characteristics of ZnO Nanowire Gas Sesnors," Appl. Phys. Lett., Vol. 84, 2004, pp. 3654–3655. 22C. Wang, X. Chu, and M. Wu, "Detection of H2S Down to ppb Levels at Room Temperature Using Sensors Based on ZnO Nanorods," Sens. Actuators B, Vol. 113, 2006, pp. 320–323. 23S. Shukla et al., "Synthesis and Characterization of Sol-Gel Derived Nanocrystalline Tin Oxide Thin Film as Hydrogen Sensor," Sens. Actuators B, Vol. 96, 2003, pp. 343–353. 24L. Vayssieres, "Growth of Arrayed Nanorods and Nanowires of ZnO from Aqueous Solution," Advanced Materials, Vol. 15, 2003, pp. 464–466. Citing Literature Volume30, Issue4August 2008Pages 516-525 ReferencesRelatedInformation