Title: Crystal Growth of CVD Diamond and some of its Peculiarities
Abstract: Crystal Research and TechnologyVolume 34, Issue 5-6 p. 553-563 Review Article Crystal Growth of CVD Diamond and some of its Peculiarities W. Piekarczyk, W. Piekarczyk Institute of Physics, Polish Academy of Sciences, PolandSearch for more papers by this author W. Piekarczyk, W. Piekarczyk Institute of Physics, Polish Academy of Sciences, PolandSearch for more papers by this author First published: 07 June 1999 https://doi.org/10.1002/(SICI)1521-4079(199906)34:5/6<553::AID-CRAT553>3.0.CO;2-8Citations: 16AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Abstract Experiments demonstrate that CVD diamond can form in gas environments that are carbon undersaturated with respect to diamond. This fact is, among others, the most serious violation of principles of chemical thermodynamics. In this paper it is shown that none of the principles is broken when CVD diamond formation is considered not a physical process consisting in growth of crystals but a chemical process consisting in accretion of macro-molecules of polycyclic saturated hydrocarbons belonging to the family of organic compounds the smallest representatives of which are adamantane, diamantane, triamantane and so forth. Since the polymantane macro-molecules are in every respect identical with diamond single crystals with hydrogen-terminated surfaces, the accretion of polymantane macro-molecules is a process completely equivalent to the growth of diamond crystals. However, the accretion of macro-molecules must be described in a way different from that used to describe the growth of crystals because some thermodynamic functions are defined in manners different for solid phases (i.e. crystals) and for molecules. The CVD diamond formation is a chemical process proceeding on surfaces of polymantane seed macro-molecules (diamond seed crystals) under conditions under which the hydrogen-terminated surfaces exist but are chemically unstable. The process consists of several cyclically recurring consecutive reactions that can be thermodynamically coupled. The present approach makes it possible to predict correlations between the growth rate as well as the phase composition of deposited films and some important process variables. The predicted dependencies are perfectly consistent with experimental results. References Anthony T. R., Vacuum, 41 (1990) 1356 Badzian A. R., Badzian T., Roy R., Messier R., Spear K. E., Mat. Res. Bull. 23 (1988) 531 Benson S. W., Thermochemical Kinetics/Methods for the Estimation of Thermochemical Data and Rate Parameters, 2nd Edition, John Wiley & Sons, New York, 1976. Harris S. J., Belton D. N., Blint R. J., New Diamond Science and Technology, 1991 MRS Int. Conf. Proc., R. Messier, J. T. Glass, J. E. Butler, R. Roy (Eds.), Mater. Res. Soc., Pittsburgh, PA, 1991, pp. 277– 289 (a). Harris S. J., Belton D. N., Blint R. J., Appl. Phys. 70 (1991) 2654 (b) Hsu W. L., Appl. Phys. Lett. 59 (1991) 1427 Hsu W. L., J. Appl. Phys. 72 (1992) 3102 Hwang N. M., Yoon D. Y., Applications of Diamond Films and Related Materials: 3rd Int. Conf. 1995, A. Feldman, Y. Tzeng, W. A. Yarbrough, M. Yoshikawa, M. Murakawa (Eds.), NIST Special Publication 885, 1995, pp. 661– 664. Karapet'yanc M. Kh., Chemical Thermodynamics, Khimiya, Moscow 1975, p. 388 (in Russian). Kelly M. A., Kapoor S., Olson D. S., Hagstrom S. B., Mater. Res. Soc. Symp. Proc. 242 (1992) 51 (a) Kelly M. A., Olson D. S., Kapoor S., Hagstrom S. B., Appl. Phys. Lett. 60 (1992) 2502 (b) Komatsu T., Yamashita H., Tamon Y., Kikuchi N., Proc. 8th Int. Symp. on Plasma Chemistry (ISPC-8), Tokyo, 1987, K. Akashi and A. Kinbara (Eds.), pp. 2487– 2492. Kondoh E., Ohta T., Mitomo T., Ohtsuka K., Appl. Phys. Lett. 59 (1991) 488 Kondoh E., Ohta T., Mitomo T., Ohtsuka K., J. Appl. Phys. 72 (1992) 705 Kondoh E., Ohta T., Mitomo T., Ohtsuka K., Diamond Relat. Mater. 3 (1994) 270 Kweon D.-W., Lee J.-Y., Kim D., J. Appl. Phys. 69 (1991) 8329 Matsumoto S., Sato Y., Tsutsumi M., Setaka N., J. Mater. Sci. 17 (1982) 3106 Ohl A., Röpke J., Schleinitz W., Diamond Relat. Mater. 2 (1993) 298 Olson D. S., Kelly M. A., Kapoor S., Hagstrom S. B., Mater. Res. Soc. Symp. Proc. 242 (1992) 43 Olson D. S., Kelly M. A., Kapoor S., Hagstrom S. B., J. Mater. Res. 9 (1994) 1546 Piekarczyk W., J. Crystal Growth, 119 (1992) 345 Piekarczyk W., Diamond Relat. Mater. 7 (1998) 47 Piekarczyk W., Messier R., Roy R., Engdahl C., J. Crystal Growth, 106 (1990) 2796 Piekarczyk W., Prawer S., Diamond Relat. Mater. 2 (1993) 41 Piekarczyk W., Prawer S., J. Crystal Growth, 135 (1994) 172 Roy R., Dewan H. S., Ravindranathan P., Mater. Res. Bull. 28 (1993) 861 (a) Roy R., Dewan H. S., Ravindranathan P., J. Mater. Chem. 3 (1993) 685 (b) Roy R., Dewan H. S., Ravindranathan P., Proc.-Electrochem. Soc. 93– 17 (1993) 160(c) Salvadori M. C., Brewer M. A., Ageriii J. W., Krishnan K. M., Brown I. G., J. Electrochem. Soc. 139 (1992) 558 Sasaki K.-I., Kurihara K., Kawarada M., New Diamond Science and Technology, 1991 MRS Int. Conf. Proc., R. Messier, J. T. Glass, J. E. Butler and R. Roy (Eds.) Mater. Res. Soc., Pittsburgh, PA, 1991, pp. 485– 490. Sato Y., New Diamond 1990, Japan New Diamond Forum, Tokyo, 1990, pp. 4– 9. Schäfer L., Klages C.-P., Meier U., Kohse-Höinghaus K., Appl. Phys. Lett. 58 (1991) 571 Shah S. I., Walls D. J., Waite M. M., Guerin D., Appl. Phys. Lett. 67 (1995) 3355 Spitsyn B. V., Bouilov L. L., Diamond and Diamond-Like Materials Synthesis, G. H. Johnson, A. R. Badzian and M. W. Geis (Eds.), Mater. Res. Soc., Pittsburgh, PA, 1988, pp. 3– 14. Wang J.-T., Wan Y.-Z., Zhang D. W., Liu Z.-J., J. Mater. Res. 12 (1997) 3250 Zhu W., Randall C. A., Badzian A. R., Messier R., J. Vac. Sci. Technol. A7 (1989) 2315 (a) Zhu W., Messier R., Badzian A. R., Proc.-Electrochem. Soc. 89– 12 (1989) 61(b) Citing Literature Volume34, Issue5-6June 1999Pages 553-563 ReferencesRelatedInformation
Publication Year: 1999
Publication Date: 1999-06-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 19
AI Researcher Chatbot
Get quick answers to your questions about the article from our AI researcher chatbot