Title: Design and Fabrication of Micro Oxygen Sensor
Abstract: In the study, a MEMS-based gas sensor is presented, which consists of a sensing thin film deposited by RF sputtering and annealed at 375°C. The structure and surface pattern of the thin film are analyzed by XRD and SEM. The sensor consists of a substrate, Pt interdigitated electrodes and an SnO 2 sensing layer. As concentration of oxygen changes, a change in the electrical conductivity of the SnO 2 film is caused. The experimental results show that the measured resistance increases as the concentration of oxygen increases at a working temperature of 300°C. A good oxygen sensing performance is presented in the study.
Publication Year: 2011
Publication Date: 2011-06-01
Language: en
Type: article
Indexed In: ['crossref']
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