Title: Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer
Abstract: We have developed a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer (COXI). The system consists of optical interferometers for two-dimensional displacements and an x-ray interferometer. The x-ray interferometer was used to calibrate the non-linearity of the optical interferometers. The x-ray interferometer can subdivide the optical interference signal with 0.2 nm linear scales. The measured non-linearity of the heterodyne optical interferometer was less than 2 nm. The calibrated optical interferometers were used to measure two dimensional nanoscale displacements, and the accuracy of the optical interferometers was reduced to sub-nanometer after the compensation. To demonstrate the application of the system, we have measured the non-linearity of capacitive sensors using the calibrated optical interferometers.
Publication Year: 2005
Publication Date: 2005-08-18
Language: en
Type: article
Indexed In: ['crossref']
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