Title: Reflection High-Energy Electron Diffraction Studies of Vicinal Si(111) Surfaces
Abstract: Analysis of the reflection high-energy electron diffraction (RHEED) patterns from the vicinal Si(111) surfaces misoriented to [112̄] shows that step bunching takes place on the surface, and the surface breaks up into (111) and (331) facets. A previously unreported superstructure is found on the (331) facet. From the temperature dependence of the diffraction spot positions, this superstructure and the 7×7 structure on the (111) facet are shown to cause the reconstruction-induced faceting.
Publication Year: 1991
Publication Date: 1991-07-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 25
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