Title: Modulation Ellipsometry - A New Technique for the Characterization of Semiconductor Materials and Complex Semiconductor Structures
Abstract: physica status solidi (a)Volume 119, Issue 1 p. K91-K95 Short Note Modulation Ellipsometry - A New Technique for the Characterization of Semiconductor Materials and Complex Semiconductor Structures J. Th. Zettler, J. Th. Zettler Zentralinstitut für Optik und Spektroskopieder Akademie der Wissenschaften der DDR, Berlin Search for more papers by this authorTh. Dittrich, Th. Dittrich and Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this authorL. Schrottke, L. Schrottke and Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this author J. Th. Zettler, J. Th. Zettler Zentralinstitut für Optik und Spektroskopieder Akademie der Wissenschaften der DDR, Berlin Search for more papers by this authorTh. Dittrich, Th. Dittrich and Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this authorL. Schrottke, L. Schrottke and Zentralinstitut für Elektronenphysik der Akademie der Wissenschaften der DDR, Berlin Search for more papers by this author First published: 16 May 1990 https://doi.org/10.1002/pssa.2211190160Citations: 10 Rudower Chaussee 6, DDR-1199 Berlin, GDR. Hausvogteiplatz 5–7, DDR-1086 Berlin, GDR. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat References 1 K. G. Merkel et al., Proc. SPIE 946, 105 (1988). for Semiconductor Technology III, 1988 (p. 105). 10.1117/12.947418 CASGoogle Scholar 2 J. L. Freeouf, Appl. Phys. Letters 53, 2426 (1988). 10.1063/1.100411 CASWeb of Science®Google Scholar 3 O. J. Glembocki et al., Surface Sci. 174, 206 (1986). 10.1016/0039-6028(86)90409-7 CASWeb of Science®Google Scholar 4 R. Enderlein, Desheng Jiang, and Yinsheng Tang, phys. stat. sol. (b) 145, 167 (1988). 10.1002/pssb.2221450114 Web of Science®Google Scholar 5 R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, North-Holland Publ. Co., Amsterdam/New York/London 1972. Google Scholar 6 M. Born and E. Wolf, Principles of Optics, Pergamon Press, 1964. Google Scholar Citing Literature Volume119, Issue116 May 1990Pages K91-K95 ReferencesRelatedInformation
Publication Year: 1990
Publication Date: 1990-05-16
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 10
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