Title: Indium Tin Oxide Thin Films Grown on Polyethersulphone (PES) Substrates by Pulsed-Laser Deposition for Use in Organic Light-Emitting Diodes
Abstract: ETRI JournalVolume 27, Issue 4 p. 405-410 Regular PaperFree Access Indium Tin Oxide Thin Films Grown on Polyethersulphone (PES) Substrates by Pulsed-Laser Deposition for Use in Organic Light-Emitting Diodes Kyung-Hyun Kim, Kyung-Hyun KimSearch for more papers by this authorNae-Man Park, Nae-Man ParkSearch for more papers by this authorTae-Youb Kim, Tae-Youb KimSearch for more papers by this authorKwan Sik Cho, Kwan Sik ChoSearch for more papers by this authorJeong-Ik Lee, Jeong-Ik LeeSearch for more papers by this authorHye Yong Chu, Hye Yong ChuSearch for more papers by this authorGun Yong Sung, Gun Yong SungSearch for more papers by this author Kyung-Hyun Kim, Kyung-Hyun KimSearch for more papers by this authorNae-Man Park, Nae-Man ParkSearch for more papers by this authorTae-Youb Kim, Tae-Youb KimSearch for more papers by this authorKwan Sik Cho, Kwan Sik ChoSearch for more papers by this authorJeong-Ik Lee, Jeong-Ik LeeSearch for more papers by this authorHye Yong Chu, Hye Yong ChuSearch for more papers by this authorGun Yong Sung, Gun Yong SungSearch for more papers by this author First published: 01 August 2005 https://doi.org/10.4218/etrij.05.0104.0166Citations: 17 Kyung-Hyun Kim (phone: +82 42 860 6586, email: [email protected]), Nae-Man Park (email: [email protected]), Tae-Youb Kim (email: [email protected]), Kwan Sik Cho (email: [email protected]), and Gun Yong Sung (email: [email protected]) are with Future Technology Research Division, ETRI, Daejeon, Korea. Jeong-Ik Lee (email: [email protected]) and Hye Yong Chu (email: [email protected]) are with Basic Research Laboratory, ETRI, Daejeon, Korea. AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Abstract High quality indium tin oxide (ITO) thin films were grown by pulse laser deposition (PLD) on flexible polyethersulphone (PES) substrates. The electrical, optical, and surface morphological properties of these films were examined as a function of substrate temperature and oxygen pressure. ITO thin films, deposited by PLD on a PES substrate at room temperature and an oxygen pressure of 15 mTorr, have a low electrical resistivity of 2.9×10−4 Ω cm and a high optical transmittance of 84 % in the visible range. They were used as the anode in organic light-emitting diodes (OLEDs). The maximum electro luminescence (EL) and current density at 100 cd/m2 were 2500 cd/m2 and 2 mA/cm2, respectively, and the external quantum efficiency of the OLEDs was found to be 2.0 %. References 1I. Hamberg and C.G. Granqvist, "Evaporated Sn-doped In2O3Films: Basic Optical Properties and Applications to Energy-Efficient Windows," J. Appl. Phys. Vol. 60, 1986, pp. R123– R160. 2K. Zhang, F. Zhu, C. Huan, and A. Wee, "Indium Tin Oxide Films Prepared by Radio Frequency Magnetron Sputtering Method at a Low Processing Temperature," Thin Solid Films, Vol. 376, 2000, pp. 255– 263. 3M. Buchanan, J.B. Webb, and D.F. Williams, "Preparation of Conducting and Transparent Thin Films of Tin-doped Indium Oxide by Magnetron Sputtering," Appl. Phys. Lett. Vol. 37, 1980, pp. 213– 215. 4P. Nath, R.F. Bunshah, B.H. Basol, and O.M. Staffsud, "Electrical and Optical Properties of In2O3: Sn Films Prepared by Activated Reactive Evaporation," Thin Solid Films, Vol. 72, 1980, pp. 463– 468. 5V. Vasu and A. Subrahmanyam, "Reaction Kinetics of the Formation of Indium Tin Oxide Films Grown by Spray Pyrolysis," Thin Solid Films, Vol. 193–194, 1990, pp. 696– 703. 6N.D. Young, R.M. Bunn, R.W. Wilks, D.J. McCulloch, S.C. Deane, M.J. Edwards, G. Harkin, and A.D. Pearson, "Thin-Film-Transistor- and Diode-Addressed AMLCDs on Polymer Substrates," J. Soc. Inf. Disp. Vol. 5/3, 1997, pp. 275– 281. 7H. Lim, W.J. Cho, C.S. Ha, S. Ando, Y.K. Kim, C.H. Park, and K. Lee, "Flexible Organic Electroluminescent Devices Based on Fluorine-Containing Colorless Polyimide Substrates," Adv. Mater., Vol. 14, 2002, pp. 1275– 1279. 8H. Kim, J.S. Hortwitz, G.P. Kushto, Z.H. Kafafi, and D.B. Chrisey, "Indium Tin Oxide Thin Films Grown on Flexible Plastic Substrates by Pulsed-Laser Deposition for Organic Light-Emitting Diodes," Appl. Phys. Lett., Vol. 79, 2001, pp. 284. 9N.M. Park, S.H. Kim, and G.Y. Sung, "Band Gap Engineering of SiCN Film Grown by Pulsed Laser Deposition," J. Appl. Phys. Vol. 94, 2003, pp. 2725– 2728. 10Nae-Man Park, Sang Hyeob Kim, and Gun Yong Sung, "Amorphous Silicon Carbon Nitride Films Grown by the Pulsed Laser Deposition of a SiC-Si3N4 Mixed Target," ETRI J., Vol. 26, no. 3, 2004, pp. 257– 261. 11Y. Yang, Q. Huang, A.W. Metz, J. Ni, S. Jin, T.J. Marks, M.E. Madsen, A. Divenere, and S.T. Ho, "High-Performance Organic Light-Emitting Diodes Using ITO Anodes Grown on Plastic by Room-Temperature Ion-Assisted Deposition," Adv. Mater., Vol. 16, 2004, pp. 321– 324. 12M.S. Hwang, H.J. Lee, H.S. Jeong, Y.W. Seo, and S.J. Kwon, "The Effect of Pulsed Magnetron Sputtering on the Properties of Indium Tin Oxide Thin Films," Surf. and Coat. Tech., Vol. 171, 2003, pp. 29– 33. 13J. Ma, S.Y. Li, J.Q. Zhao, and H.L. Ma, "Preparation and Properties of Indium Tin Oxide Films Deposited on Polyester Substrates by Reactive Evaporation," Thin Solid Films, Vol. 307, 1997, pp. 200– 202. 14J. Kido and Y. Iizumi, "Fabrication of Highly Efficient Organic Electroluminescent Devices," Appl. Phys. Lett., Vol. 73, 1998, pp. 2721– 2723. 15H. Murata, C.D. Merritt, H. Mattoussi, and Z.H. Kafafi, "Dye-Doped Molecular Light-Emitting Diodes with Enhanced Performance," Proc. SPIE, Vol. 3476, 1998, pp. 88– 95. 16H. Izumi, T. Ishihara, H. Yoshida, and M. Motoyama, "Electrical Properties of Crystalline ITO Films Prepared at Room Temperature by Pulsed Laser Deposition on Plastic Substrates," Thin Solid Films, Vol. 411, 2002, pp. 32– 35. 17S.K. Park, J.I. Han, W.K. Kim, and M.G. Kwak, "Deposition of Indium–Tin-Oxide Films on Polymer Substrates for Application in Plastic-based Flat Panel Displays," Thin Solid Films, Vol. 397, 2001, pp. 49– 55. Citing Literature Volume27, Issue4August 2005Pages 405-410 ReferencesRelatedInformation