Title: Preferentially etched diffraction gratings in silicon
Abstract: Here, we describe the fabrication of diffraction gratings in the {100} surfaces of silicon by preferential etching. The gratings thus made have grooves with well-defined geometric shape and bounded by nearly perfect reflecting walls. Meanwhile, the importance of utilizing this technique in integrated optics is also discussed.
Publication Year: 1975
Publication Date: 1975-05-01
Language: en
Type: article
Indexed In: ['crossref']
Access and Citation
Cited By Count: 45
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