Title: Enhancement of Si oxidation by cerium overlayers and formation of cerium silicate
Abstract: The oxidation of Si(100) surfaces covered with 3 A\r{} Ce was studied by high-resolution photoemission spectroscopy. The oxygen uptake was found to be enhanced by orders of magnitude by the presence of Ce. Because of chemical reaction between Ce and Si, a mixed oxide with a Ce:Si:O composition ratio of 1:1:3 is formed. The sharp photoemission spectra of this oxide indicate the formation of a well-defined compound in which both Ce and Si are in a 3+ oxidation state.
Publication Year: 1986
Publication Date: 1986-10-15
Language: en
Type: article
Indexed In: ['crossref', 'pubmed']
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Cited By Count: 100
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