Title: Effect of Al incorporation on the crystallization kinetics of amorphous FeSi2 into poly β-FeSi2 film on SiO2/Si(100) substrate
Abstract: Differential Scanning Calorimetry (DSC) was used to study the effect of Al incorporation on the crystallization of β-FeSi2 film on SiO2/Si(100) substrate. An exothermic reaction pertaining to the crystallization of β-FeSi2, confirmed using X-Ray Diffraction, can be observed by heating a 1.2 μm amorphous FeSi2 film in the DSC. Using Kissinger analysis, the activation energy of thin β-FeSi2 crystallization was determined to be 2.63 ± 0.05 eV. In this study, it was found that the activation energy for β-FeSi2 crystallization increases with Al incorporation by co-sputtering. Hall measurements show the Al incorporated β-FeSi2 to be P-type.
Publication Year: 2012
Publication Date: 2012-01-01
Language: en
Type: article
Indexed In: ['crossref']
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Cited By Count: 7
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